A Transportation Equipment of Zirconium Source for ZrCl4 Vapor Method Depositing ZrC Coatings

LIU Chao,LIU Bing,SHAO Youlin,LI Ziqiang,TANG Chunhe
DOI: https://doi.org/10.3321/j.issn:1000-0054.2008.03.036
2008-01-01
Abstract:A system was designed and manufactured to transport the zirconium source in chemical vapor deposition of ZrC on fuel particles using ZrCl4 vapor method.A crucible resistance furnace was adapted to connect the vaporizer to the temperature-controlled target cabinet.The stainless steel vaporizer included a special pressure gauge to measure the pressure in the high temperature and corrosive environment.Heaters and fibre glass were used to maintain ZrCl4 vapor temperature during transport.Tests show that the ZrCl4 vapor can be efficiently transported by controlling the ZrCl4 vapor temperature and the carrier gas flow rate to give satisfactory deposition of the ZrC coatings.
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