Synthesis of nanostructured materials by hot and cold plasma

Wenzhong Lai,Jie Zheng,Rong Yang,Lei Xie,Xingguo Li
2009-01-01
Abstract:Recently we investigated synthesis of nanostructured metals and compounds by hydrogen plasma metal reaction (HPMR) and RF cold plasma, respectively. By HPMR, we synthesized pure metallic nanoparticles of metals, nanostructured Mg and Li-based hydrides. The results show that nanoparticles or hollow nanospheres can be prepared by HPMR in large scale. On other hand, by NH3 RF cold plasma, nanowires of amorphous silicon oxynitrides (a-SiOxNy) were successfully prepared. The results show that both the active hydrogen and nitrogen species generated in the NH3 plasma were essential for a-SiOxNy nanowire formation: the former one kept the activity of the catalyst while the later one ensured efficient nitrogen incorporation.
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