Abstract:In this paper, multifunctional, multilevel phase plates of quartz substrate were efficiently prepared by using a newly developed polygon scanner-based femtosecond laser photolithography system combined with inductively coupled discharge plasma reactive-ion etching (ICP-RIE) technology. The femtosecond laser photolithography system can achieve a scanning speed of 5 m/s and a preparation efficiency of 15 cm2/h while ensuring an overlay alignment accuracy of less than 100 nm and a writing resolution of 500 nm. The ICP-RIE technology can control the etching depth error within ±5 nm and the mask-to-mask edge error is less than 1 μm. An 8-level Fresnel lens phase plate with a focal length of 20 mm and an 8-level Fresnel axicon phase plate with a cone angle of 5° were demonstrated. The diffraction efficiency was greater than 93%, and their performance was tested for focusing and glass cutting, respectively. Combined with the high-speed femtosecond laser photolithography system's infinite field-of-view (IFOV) processing capability, the one-time direct writing preparation of phase plate masks of different sizes was realized on a 6-inch wafer. This is expected to reduce the production cost of quartz substrate diffractive optical elements and promote their customized mass production.

High fi ll-factor multilevel Fresnel zone plate arrays by femtosecond laser direct writing

High Fill-Factor Multilevel Fresnel Zone Plate Arrays By Femtosecond Laser Direct Writing

High efficiency and scalable fabrication of fresnel zone plates using holographic femtosecond pulses

Optimization of the Focusing Characteristics of Fresnel Zone Plates Fabricated with a Femtosecond Laser

Remarkable Optical Coupling Enhancement with Laser Selective Focusing Devices

Investigation of Quadrate Fresnel Zone Plates Fabricated by Femtosecond Laser Direct Writing

Dielectric Fresnel Zone Plates on Optical Fibers for Micro-Focusing Applications

Dual‐Wavelength Focusing Through Fresnel Zone Plate Fabricated in Lithium Niobate Crystal by Femtosecond Laser Micromachining

Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

High Efficiency Multilevel Phase-Type Fractal Zone Plates.

Fabricating High-Quality Fresnel Zone Plates by Efficiently Eliminating Redeposition Based on Focused Ion Beam

Experimental Verification of the Super-Resolution Focusing Optical Needle and Imaging with a New Type Fresnel Zone Plate

Phase-Type Fresnel Zone Plate with Multi-Wavelength Imaging Embedded in Fluoroaluminate Glass Fabricated via Ultraviolet Femtosecond Laser Lithography

Axial Intensity Distribution of a Micro-Fresnel Zone Plate at an Arbitrary Numerical Aperture

Dual-Band Fresnel Zone Plate Antenna With Independently Steerable Beams

Gold Filled in Fresnel Zone Plate Fabricated by Femtosecond Laser on Fiber Tip

Photorefractive filament array formed in PDMs by fs pulse laser

3D High Precision Laser Printing of a Flat Nanofocalizer for Subwavelength Light Spot Array

Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining

Fractal zone plates for wideband imaging with low chromatic aberration and extended depth of field