Abstract:Transmittance is critical to the performance of optoelectronic devices, and the fabrication of nanostructure arrays with sizes and periods similar to wavelengths on optical surfaces can effectively reduce reflectance and increase transmittance. A method combining a femtosecond laser and the near-field effect of polystyrene (PS) micro-spheres to prepare integrated high-performance anti-reflective nanostructure arrays on aluminum-doped zinc oxide (AZO) film was proposed in this study. The near-field effect of microspheres with different diameters on a laser light field for several laser wavelengths was simulated with the finite-difference time-domain (FDTD) method. The simulation results showed that a 10-fold improvement of the intensity of a focused laser beam could be obtained with the combination of an 800-nm laser and 1-mu m PS microspheres. Nano-craters on the surface of the AZO film were obtained with femtosecond laser irradiation. The depth and the area of these nano craters both increased with the increase of the laser fluences and tended toward saturation when the fluence went from 0.67 to 0.83 J/cm2. Facilitated by the gradient refractive index formed by the nano-craters, the transmittance of the sample treated with 0.83 J/cm2 increased by 8% in the 400-1100 nm band and even by 15% in the 400-600 nm band. The ablation mechanism was revealed by the time-resolved pump-probe technique, which proved that the nano-craters were formed by the phase explosion, and the smooth bottom with fine cracks was induced by the inhomogeneous resolidification of the superheated liquid phase. Our method could endow a photoelectric device with high-performance integrated anti-reflection capability, eliminating the need for additional anti-reflection coating.

High Fill-Factor Multilevel Fresnel Zone Plate Arrays By Femtosecond Laser Direct Writing

High fi ll-factor multilevel Fresnel zone plate arrays by femtosecond laser direct writing

High efficiency and scalable fabrication of fresnel zone plates using holographic femtosecond pulses

Optimization of the Focusing Characteristics of Fresnel Zone Plates Fabricated with a Femtosecond Laser

Remarkable Optical Coupling Enhancement with Laser Selective Focusing Devices

Photorefractive filament array formed in PDMs by fs pulse laser

Investigation of Quadrate Fresnel Zone Plates Fabricated by Femtosecond Laser Direct Writing

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Fabricating High-Quality Fresnel Zone Plates by Efficiently Eliminating Redeposition Based on Focused Ion Beam

Dielectric Fresnel Zone Plates on Optical Fibers for Micro-Focusing Applications

Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Phase-Type Fresnel Zone Plate with Multi-Wavelength Imaging Embedded in Fluoroaluminate Glass Fabricated via Ultraviolet Femtosecond Laser Lithography

Dual‐Wavelength Focusing Through Fresnel Zone Plate Fabricated in Lithium Niobate Crystal by Femtosecond Laser Micromachining

Gold Filled in Fresnel Zone Plate Fabricated by Femtosecond Laser on Fiber Tip

High Efficiency Multilevel Phase-Type Fractal Zone Plates.

Dual-Band Fresnel Zone Plate Antenna With Independently Steerable Beams

Experimental Verification of the Super-Resolution Focusing Optical Needle and Imaging with a New Type Fresnel Zone Plate

Axial Intensity Distribution of a Micro-Fresnel Zone Plate at an Arbitrary Numerical Aperture

3D High Precision Laser Printing of a Flat Nanofocalizer for Subwavelength Light Spot Array

Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing

High-performance Antireflection Nanostructure Arrays on Aluminum-Doped Zinc Oxide Film Fabricated with Femtosecond Laser Near-Field Processing