Abstract Submitted for the GEC17 Meeting of The American Physical Society Effect of electron energy distribution function on formation of graphene nanocrystallites during electron-irradiation-induced carbon film growth process in an ECR Plasma1

WENCONG CHEN,XI ZHANG,DONGFENG DIAO,Wencong Chen

2017-01-01

Abstract:Submitted for the GEC17 Meeting of The American Physical Society Effect of electron energy distribution function on formation of graphene nanocrystallites during electron-irradiation-induced carbon film growth process in an ECR Plasma1 WENCONG CHEN, XI ZHANG, DONGFENG DIAO, Shenzhen University, INSTITUTE OF NANOSURFACE SCIENCE AND ENGINEERING TEAM — Recently, a low-energy electron irradiation technique was developed to deposit graphene-nanocrystallites-embedded carbon (GNEC) films which manifests unique tribological, magnetic and optoelectronic properties. However, the role played by low-energy electrons in this process remains unclear. During the electron irradiation process, substrates are positively biased and electrons produced in the plasma are accelerated to irradiate the deposited GNEC films. In this work, electron energy distribution function on the substrate surface during the electron-irradiation-induced carbon film growth process in an ECR (Electron Cyclotron Resonance) plasma is measured with a retarding field energy analyzer (RFEA). The deposition temperature is probed by an infrared thermometer. A Langmuir probe is used to monitor the plasma potential and calibrate the current sensitivity of the RFEA. It is found that the size and concentration of graphene nanocrystallites strongly depend on the irradiation electron energy and the electron flux but not the temperature, which indicates that the electron excitation effect of the covalent bonds dominate the formation process of these nanocrystallites. This finding sheds light on the interaction between the plasma and carbon materials. 1This work is supported by the National Nature Science Foundation of China (Nos 11605115, 51575359, and 51605306). Wencong Chen Shenzhen University Date submitted: 01 Jun 2017 Electronic form version 1.4