Abstract:The microelectronics industry is pushing the fundamental limit on the physical size of individual elements to produce faster and more powerful integrated chips. These chips have nanoscale features that dissipate power resulting in nanoscale hotspots leading to device failures. To understand the reliability impact of the hotspots, the device needs to be tested under the actual operating conditions. Therefore, the development of high-resolution thermometry techniques is required to understand the heat dissipation processes during the device operation. Recently, several thermometry techniques have been proposed,such as radiation thermometry, thermocouple based contact thermometry, scanning thermal microscopy (SThM), scanning transmission electron microscopy (STEM) and transition based threshold thermometers. However, most of these techniques have limitations including the need for extensive calibration, perturbation of the actual device temperature, low throughput, and the use of ultra-high vacuum. Here, we present a facile technique, which uses a thin film contact thermometer based on the phase change material Ge2Sb2Te5, to precisely map thermal contours from the nanoscale to the microscale. Ge2Sb2Te5 undergoes a crystalline transition at Tg with large changes in its electric conductivity, optical reflectivity and density. Using this approach, we map the surface temperature of a nanowire and an embedded micro-heater on the same chip where the scales of the temperature contours differ by three orders of magnitude. The spatial resolution can be as high as 20 nanometers thanks to the continuous nature of the thin film.

High Available Carbon Nanotube Film Micro-Device With Controllable Temperature Coefficient Of Resistance

Flexible self-assembly carbon nanotube/polyimide thermal film endowed adjustable temperature coefficient of resistance

Electrothermal Characterization of Carbon Nanotube Field Effect Transistors (Cntfets)

Quantitative Thermal Imaging of Single-Walled Carbon Nanotube Devices by Scanning Joule Expansion Microscopy.

Dry-transferred Single-Walled Carbon Nanotube Thin Films for Flexible and Transparent Heaters

Heating-Rate-Triggered Carbon-Nanotube-based 3-Dimensional Conducting Networks for a Highly Sensitive Noncontact Sensing Device

High Sensitivity Temperature Sensor Based on A Long, Suspended Single-Walled Carbon Nanotube Array

Microheater Chips with Carbon Nanotube Resistors

Carbon nanotube-based flexible electrothermal film heaters with a high heating rate

Thermal Management for Purification of Aligned Arrays of Single-Walled Carbon Nanotubes Based on Thermocapillary Flow by Pulsed Heating

Integrated, Highly Flexible, and Tailorable Thermoelectric Type Temperature Detectors Based on a Continuous Carbon Nanotube Fiber

Screen-printed flexible temperature sensor based on FG/CNT/PDMS composite with constant TCR

Temperature‐Dependent Electrical Transport Properties of Single‐Walled Carbon Nanotube Thin Films Prepared by Electrohydrodynamic Atomization Technique

High-Quality Conductive Network Films Constructed from Carbon Nanotube/Carbon Nanofiber Composites via Electrospinning for Electrothermal Applications

Interface Engineering for High-Performance Thermoelectric Carbon Nanotube Films

Regulatable Thermal Conductivity and Excellent Mass Transport of Water-Filled Carbon Nanotube As Capillary Wicks

Controllable Construction of CNT-Interconnected Liquid Metal Networks for Thermal Management

Ultra-long air-stability of n-type carbon nanotube films with low thermal conductivity and all-carbon thermoelectric generators

Precise nanoscale temperature mapping in operational microelectronic devices by use of a phase change material

Low-Temperature, Directly Depositing Individual Single-Walled Carbon Nanotubes for Fabrication of Suspended Nanotube Devices

Printing of Carbon Nanotube-Based Temperature and Bending Sensors for High-Temperature-Resistant Intelligent Textiles