Phase-Controlled Oscillation in a Capacitive Nonlinear Ring Resonator with On-Chip Feedthrough De-Embedding

Dongyang Chen,Hemin Zhang,Jiangkun Sun,Milind Pandit,Guillermo Sobreviela,Yong Wang,Qian Zhang,Ashwin Seshia,Jin Xie

DOI: https://doi.org/10.1109/mems46641.2020.9056278

2020-01-01

Abstract:Mechanical oscillators employing varying capacitance scheme for the transduction of the motion are significantly limited by the effects of capacitive feedthrough. This work focuses on revealing the nature of feedthrough parasitic dominated resonance and demonstrating a phase-controlled oscillation technique for operating microresonators beyond the nonlinear regime with on-chip feedthrough effect (FE) de-embedding. Our method imposes hybrid control on the phase offset of the resonant motion and electromechanical coupling of the transducers to enable the isolation of the FE in the nonlinear bifurcation points. The strategies of the on-chip FE control in our capacitive platform can be suitably transformed for the use in feedthrough parasitic dominated systems using alternative transduction principles as well.