High Performance of LTCC with Al2O3/BN Biphasic Ceramics based on BBSZ Glass

Xiangyan Feng,Yuanyuan Lv,Lan Zhang,Jianjun Ding,Jun Sun,Xiaoxiao Li,Lin Chen,Kang Zheng,Xian Zhang,Xingyou Tian

DOI: https://doi.org/10.1002/adem.201901486

IF: 3.6

2020-01-01

Advanced Engineering Materials

Abstract:With the rapid development of microelectronic information technology, high-power electronic devices require high heat dissipation. Herein, the preparation of low-temperature cofired ceramic (LTCC) applications with excellent thermal conductivity and dielectric properties is focused. B2O3-Bi2O3-SiO2-ZnO (BBSZ) glass/Al2O3/BN green sheets are prepared by tape casting and sintered at 850 degrees C. The crystal phase composition, microstructure, thermal conductivity, thermal expansion coefficient, and dielectric properties of LTCC are investigated. It is shown that nanoscale rod crystals ZnAl2O4 and Bi are formed in the composite. The generated nanoscale rod crystals build a 3D heat conduction channel in the composite. The thermal conductivity of the sintered sheet with 20 wt% BN is 5.165 W m(-1) K-1. The sintered sheet containing 20 wt% BN has a low coefficient of thermal expansion (2.92 ppm degrees C-1) matched well with silicon and excellent dielectric properties (epsilon(r) = 3.9672, tan delta = 1.49 x 10(-3)) at 20 GHz. This material has great potential applications in electronic devices.