Effect of Sidewall Roughness on Polymer Waveguide for Optical Interconnects Application

Ying Shi,Lin Ma,Zuyuan He

DOI: https://doi.org/10.1109/icsj47124.2019.8998673

2019-01-01

Abstract:Roughness induced scattering loss of polymer waveguide are numerically and experimentally investigated. Our results show that the sidewall roughness induced loss is dominant and increases largely when waveguide width is smaller than 10 μm.

What problem does this paper attempt to address?

Investigation On Roughness-Induced Scattering Loss Of Small-Core Polymer Waveguides For Single-Mode Optical Interconnect Applications

Ying Shi,Lin Ma,Yudi Zhuang,Zuyuan He

DOI: https://doi.org/10.1364/OE.410283

IF: 3.8

2020-01-01

Optics Express

Abstract:We investigated the roughness-induced scattering loss (Loss(R)) of small-core polymer waveguides fabricated using the photolithography method, both theoretically and experimentally. The dependence of Loss(R) on the roughness parameter, waveguide dimension, operation wavelength, refractive index difference and distribution, polarization sensitivity, sidewall angle, and bending radius were studied. The surface roughness of both the sidewall and the top/bottom of the fabricated waveguides were measured using laser confocal microscope, and the results showed that the averaged sidewall roughness was approximately 60 nm, which is 3 times that of the top/bottom surface. As a result, the sidewall roughness-induced Loss(R) is 9 times that induced by the top/bottom roughness. The calculated value of Loss(R) agrees well with the measured value. Loss(R) increases rapidly with the decrease in the waveguide width, especially when the waveguide width is reduced below 10 mu m, at which the Loss(R) is approximately 0.3 dB/cm. On the other hand, the dependence of Loss(R) on the waveguide height is negligible. Our results provide guidance for developing single-mode polymer waveguides with low loss for optical interconnect applications. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Investigation of Roughness Induced Scattering Loss of Polymer Waveguides for Optical Printed Circuit Board Application.

Ying Shi,Lin Ma,Xiao Xu,Shoulin Jiang,Zuyuan He

DOI: https://doi.org/10.23919/ps.2019.8817666

2019-01-01

Abstract:We numerically and experimentally investigated the sidewall roughness induced scattering loss of polymer waveguides. The results show that the scattering loss largely increase when the core width of the waveguide is smaller than 10 μm.
Roughness-induced Radiation Losses in Optical Micro or Nanofibers.

Gaoye Zhai,Limin Tong

DOI: https://doi.org/10.1364/oe.15.013805

IF: 3.8

2007-01-01

Optics Express

Abstract:Roughness-induced radiation losses in optical micro or nanofibers (MNFs) are investigated using an induced-current model. Loss coefficients of silica, phosphate, tellurite and silicon MNFs with sinusoidal deformations on their surfaces are numerically calculated with respect to typical parameters of the guiding system. Interesting phenomena such as the existence of the loss minima at specific perturbation periods are observed. Results presented in this work may be generalized to all kinds of surface deformation and may provide useful guidelines for both estimating and tailoring waveguiding properties of MNFs.
Fabrication and Performance Analysis of Polymer Waveguides for Optical Interconnects

Xiao Xu,Lin Ma,Wenjia Zhang,Jiangbing Du,Zuyuan He

DOI: https://doi.org/10.1109/oic.2016.7482992

2016-01-01

Abstract:We designed and fabricated low loss polymer waveguides (<0.05 dB/cm at 850 nm) using a lithography method. We experimentally investigated their insertion loss and numerically analyzed their mode power distribution and differential mode delay dependence on the launch condition for high speed optical interconnects.
Reduction of Sidewall Roughness, Insertion Loss and Crosstalk of Polymer Arrayed Waveguide Grating Using Vapor-Redissolution Technique

Hai-Ming Zhang,Chun-Sheng Ma,Zhen-Kun Qin,Xi-Zhen Zhang,Dan Zhang,Shi-Yong Liu,Da-Ming Zhang

DOI: https://doi.org/10.1016/j.tsf.2007.02.068

IF: 2.1

2007-01-01

Thin Solid Films

Abstract:An efficient vapor-redissolution technique is used to greatly reduce sidewall scattering loss in the polymer arrayed waveguide grating (AWG) fabricated on a silicon substrate. Smoother sidewalls are achieved and verified by scanning electron microscopy. Reduction of sidewall scattering loss is further measured for the loss measurement of both straight waveguides and AWG devices. The sidewall loss in straight polymer waveguide is decreased by 2.1 dB/cm, the insertion loss of our AWG device is reduced by about 5.5 dB for the central channel and 6.7 dB for the edge channels, the crosstalk is reduced by 2.5 dB, and 3-dB bandwidth is narrowed by 0.05 nm after the vapor-redissoluton treatment.
Loss and Bandwidth Studies on Multimode Polymer Waveguide Components for On-Board High-Speed Optical Interconnects

Jian Chen,Nikolaos Bamiedakis,Peter P. Vasil'ev,Richard V. Penty,Ian H. White

DOI: https://doi.org/10.48550/arXiv.1701.00846

2017-01-03

Abstract:Optical interconnects play a key role in the implementation of high-speed short-reach communication links within high-performance electronic systems. Multimode polymer waveguides in particular are strong candidates for use in passive optical backplanes as they can be cost-effectively integrated onto standard PCBs. Various optical backplanes using this technology and featuring a large number of multimode polymer waveguide components have been recently demonstrated. The optimisation of the loss performance of these complex waveguide layouts becomes particularly important at high data rates (>=25 Gb/s) due to the associated stringent power budget requirements. Moreover, launch conditions have to be carefully considered in such systems due to the highly-multimoded nature of this waveguide technology. In this paper therefore, we present thorough loss and bandwidth studies on siloxane-based multimode waveguides and waveguide components (i.e. bends and crossings) that enable the implementation of passive optical backplanes. The performance of these components is experimentally investigated under different launch conditions for different waveguide profiles that can be readily achieved through fabrication. Useful design rules on the use of waveguide bends and crossings are derived for each waveguide type. It is shown that the choice of waveguide parameters depends on the particular waveguide layout, assumed launch conditions and desired link bandwidth. As an application of these studies, the obtained results are employed to optimise the loss performance of a 10-card shuffle router and enable >=40 Gb/s data transmission.

Emerging Technologies
Optimization Design for Polymeric S-shaped Ridge Waveguide

RongGuo Lu,JinKun Liao,XiongGui Tang,HePing Li,YongZhi Liu

DOI: https://doi.org/10.1007/s11434-009-3352-8

2010-01-01

Abstract:The dispersion characteristics and transverse field distribution of the fundamental and higher order modes are analyzed for polymeric ridge multimode waveguide by a new technique which is based on the combination of the effective index method and the variational method. An algorithm is implemented to study the effect of the structure parameters and dimensions on the dispersion curves. The optical field distribution of the fundamental and higher order modes for TM modes are computed. The single mode conditions of polymeric ridge waveguide are obtained. The relationship between the curvature radius and the bending loss of S-shaped ridge waveguide are studied with wide-angle finite-difference beam propagation method and effective index method. The conclusion is: when the curvature radius is larger than 5000 μm, the bending loss will not decrease distinctly even if the curvature radius increases, and the light can propagate stably in the S-shaped ridge waveguide.
Practical Evaluation of Polymer Waveguides for High-Speed and Meter-Scale On-Board Optical Interconnects

Xiao Xu,Lin Ma,Marika Immonen,Xinhong Shi,Brandon W. Swatowski,Jon V. DeGroot,Zuyuan He

DOI: https://doi.org/10.1109/jlt.2018.2847461

IF: 4.7

2018-01-01

Journal of Lightwave Technology

Abstract:We comprehensively evaluated optical characteristics, environmental stabilities, fiber optics compatibilities, and high-speed performances of multimode polymer waveguides fabricated in small batch with a length of 946 mm. The waveguides exhibit a low transmission loss (0.046 dB/cm at a wavelength of 850 nm), low interchannel crosstalk (<= -58 dB), and a large misalignment tolerance (+/- 20 mu m) between fiber and waveguide. The waveguides show good environmental stability and the increase of propagation loss is as small as 0.005 dB/cm and 0.004 dB/cm after a 1000-h ageing test and five solder reflow cycles, respectively. The waveguides have good compatibilities w ith fibers having different core diameters and index profiles that may be encountered in the real application environment. High-speed transmission performances were evaluated using both nonreturn to zero (NRZ) transmission at data rates of 25 Gb/s and 30 Gb/s, and PAM4 transmission at data rates of 20 Gb/s and 56 Gb/s, respectively. There is no obvious degradation on the eye diagram due to the insertion of the waveguide. Error free transmission were successfully obtained for NRZ transmission at data rates of both 25 Gb/s and 30 Gb/s. The BER for PAM4 transmission reached a level of 10(-4) at data rates of both 10 Gbaud (20 Gb/s) and 28 Gbaud (56 Gb/s), which is well below the forward error correction limitation. Moreover, it is the bandwidth of the test equipment rather than the polymer waveguide itself that limits the high-speed transmission performances in our experiments. The results demonstrate that the polymer waveguides are good candidates for high-speed and meter-scale on-board optical interconnect applications.
Fabrication and Performance Evaluation of Polymer Waveguides for Optical Printed Circuit Board Applications

Xu Xiao,Ma Lin,Zhang Wenjia,Du Jiangbing,He Zuyuan

DOI: https://doi.org/10.3788/aos201636.0613001

2016-01-01

Abstract:Polymer optical waveguides are fabricated on FR-4 substrates with UV-curable epoxy resins by the lithography method.The experiment results show that the typical loss and the crosstalk of the waveguides are less than 0.05 dB/cm and-60 dB,respectively.Moreover,the waveguides exhibit good misalignment tolerance.When there is a misalignment of ±5 μm at the input end,the increased insertion loss is less than 0.2 dB.A simulation model based on beam propagation method is used to investigate the mode power distribution,differential mode delay,and dependence of coupling efficiency on the launching conditions.The results indicate that using a fiber with core diameter comparable with the size of the waveguide excites fewer higher order modes and largely improves the waveguide performance.The fabricated optical polymer waveguides are promising as key devices for optical printed circuit board applications.
Single-mode Polymer Waveguides and Devices for High-Speed On-Board Optical Interconnect Application

Lin Ma,Xiao Xu,Zuyuan He

DOI: https://doi.org/10.1117/12.2511053

2019-01-01

Abstract:We demonstrate single-mode polymer waveguides and devices fabricated by using commercially available UV-curable epoxies and the mosquito method for on-board high-speed optical interconnects application. Both circular core single mode waveguides operating at 1550 nm with a transmission loss of 0.79 dB/cm and waveguide based devices such as 3D directional coupler and mode (de)multiplexer have been designed and fabricated. The results imply that the proposed single-mode polymer waveguides and devices have good potential in high-density and high-speed on-board optical interconnects application.
Steam-Redissolution Technique for Reduction of Polymer/Si Arrayed Waveguide Grating Loss

Haiming Zhang,Chunsheng Ma,Zhengkun Qin,Xizhen Zhang,Dan Zhang,Shiyong Liu,Daming Zhang

DOI: https://doi.org/10.3321/j.issn:0253-2239.2007.04.024

2007-01-01

Abstract:Arrayed waveguide grating (AWG) is a key device in wavelength-division multiplexing (WDM) system. Polymer arrayed waveguide grating has recently attracted much attention due to its easier fabrication and higher-density device integration. Sidewall roughness scattering is one of the main loss factors for polymer arrayed waveguide grating. Reduction of sidewall scattering loss plays an important role in fabricatiton of low-loss polymer arrayed waveguide grating. An efficient steam-redissolution technique is used to greatly reduce sidewall scattering loss in the polymer/Si arrayed waveguide grating. The mechanism of this technique is that saturated solvent molecules adsorb and get into sidewalls of waveguides and enhance their fluidity, and then reduce roughness of side walls. Smoother sidewalls are achieved and verified by a scanning electron microscopy. Both straight waveguides and arrayed waveguide grating devices are steam-redissolved and reduction of their sidewall scattering loss is further measured. The sidewall loss in straight polymer waveguide is decreased by 2.1 dB/cm, the insertion loss of an arrayed waveguide grating device is reduced by about 5.5 dB for the central channel and 6.7 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the steam-redissolution.
Measurements and Modeling of Atomic-Scale Sidewall Roughness and Losses in Integrated Photonic Devices

Samantha Roberts,Xingchen Ji,Jaime Cardenas,Mateus Corato-Zanarella,Michal Lipson

DOI: https://doi.org/10.1002/adom.202102073

IF: 9

2022-01-01

Advanced Optical Materials

Abstract:Atomic-level imperfections play an increasingly critical role in nanophotonic device performance. However, it remains challenging to accurately characterize the sidewall roughness with sub-nanometer resolution and directly correlate this roughness with device performance. We have developed a method that allows us to measure the sidewall roughness of waveguides made of any material (including dielectrics) using the high resolution of atomic force microscopy. We illustrate this method by measuring state-of-the-art photonic devices made of silicon nitride. We compare the roughness of devices fabricated using both DUV photo-lithography and electron-beam lithography for two different etch processes. To correlate roughness with device performance we describe what we call a new Payne-Lacey Bending model, which adds a correction factor to the widely used Payne-Lacey model so that losses in resonators and waveguides with bends can be accurately predicted given the sidewall roughness, waveguide width and bending radii. Having a better way to measure roughness and use it to predict device performance can allow researchers and engineers to optimize fabrication for state-of-the-art photonics using many materials.
Optimized Inductively Coupled Plasma Etching for Poly(Methyl-Methacrylate-Glycidly-Methacrylate) Optical Waveguide

Xiaoqiang Sun,Xiaodong Li,Changming Chen,Kun Zhang,Jie Meng,Xibin Wang,Tianfu Yang,Daming Zhang,Fei Wang,Zhiyuan Xie

DOI: https://doi.org/10.1016/j.tsf.2012.05.016

IF: 2.1

2012-01-01

Thin Solid Films

Abstract:Optical loss is a crucial quality for the application of polymer waveguide devices. The optimized oxygen inductively coupled plasma etching conditions, including antenna power, bias power, chamber pressure, O-2 flow rate and etching time for the fabrication of smooth vertical poly(methyl-methacrylate-glycidly-methacrylate) channel waveguide were systematically investigated. Atomic force microscopy and scanning electron microscopy were used to characterize the etch rate, surface roughness and vertical profiles. The increment of etch rate with the antenna power, bias power and O-2 flow rate was observed. Bias power and chamber pressure were found to be the main factor affecting the interface roughness. The vertical profiles were proved to be closely related to antenna power, bias power and O-2 flow rate. Surface roughness increment was observed when the etching time increased. (C) 2012 Elsevier B. V. All rights reserved.
Effects of surface roughness on lossy rectangular waveguide

Juan Chen,Binke Huang

2012-01-01

Abstract:The integral equation method combined with the surface-impedance boundary condition is applied for the analysis of propagation characteristics of rough lossy metal waveguides. The surface roughness of waveguide is random, and the statistical properties associated to the wall roughness are consistent with a Gaussian random process. The effects of the waveguide parameters on the propagation constant and attenuation constant are discussed rigorously, including the frequency, the standard deviation of height and correlation length of the Gaussian roughness. The results show that, as the increases of correlation length and frequency, the propagation constant is increased and the attenuation constant is decreased; while as the increase of the standard deviation, the trends of the propagation constant and the attenuation constant are just opposite.
Analysis and Optimization of Sidewall Roughness on Microwave Performance of Through-Glass Vias in 3-D Integrated Circuits

Zhen Fang,Jihua Zhang,Jinxu Liu,Hongwei Chen,Libin Gao,Xiaolin Yang,Wenlei Li,Xingzhou Cai,Huan Guo

DOI: https://doi.org/10.1109/tmtt.2023.3280945

IF: 4.3

2024-01-01

IEEE Transactions on Microwave Theory and Techniques

Abstract:The integrity and reliability of signal transmission in glass 3-D integrated circuits (ICs) can be improved by studying the effect of sidewall roughness of through-glass vias (TGVs) on microwave performance. Thus, in this study, the effect of different sidewall roughness of TGVs on the electrical characteristics, such as loss, delay, and impedance correction factors, are analyzed by extracting S-parameters from the CPW-TGVs-CPW model. An accurate RLGC electrical model of TGVs that considers sidewall roughness is proposed. The correction factor of inductance is verified and found to be greater than that of resistance through simulation, physical measurements, and microscopic characterization analysis. Meanwhile, the sidewall roughness was improved by controlling the laser-induced wet etching (LIWE) process of TGVs. It was greatly reduced from $1.257 \mu \text{m}$ to 25 nm. The proposed electrical model is accurately verified below 40 GHz by extracting the electrical parameters of TGVs with different sidewall roughness.
Influence of Non-Trapezoidal Cross Section on Polarization Characteristics and Leakage Loss of LNOI Ridge Waveguide

Ming Zhang,Jing Zhang,Yu Fan,Zhaoqiong Yu,Ying Du

DOI: https://doi.org/10.1140/epjp/s13360-024-05618-w

2024-01-01

The European Physical Journal Plus

Abstract:In order to research the influence of waveguide cross-sectional shape on LNOI ridge waveguide, a non-trapezoidal shallow-etched ridge waveguide with an arc-shaped angle at the top of the ridge region was proposed. The polarization characteristics and leakage loss of the waveguide under different cross-sectional parameters as well as the relationship between leakage loss and transmittivity under different angles of sidewall were analyzed using vector finite element method. It is found that the smaller the leakage loss, the greater the transmittivity. Additionally, increasing the radius of arc-shaped angle and the angle of sidewall significantly enhances the polarization properties and reduces leakage loss and appropriate arc-shaped angle can facilitate mode conversion, thereby optimizing waveguide performance. Therefore, the results are expected to provide valuable references for further optimizing the design and fabrication of LNOI ridge waveguide.
Circular-core Single-Mode Polymer Waveguide for High-Density and High-Speed Optical Interconnects Application at 1550 Nm

Xiao Xu,Lin Ma,Shoulin Jiang,Zuyuan He

DOI: https://doi.org/10.1364/oe.25.025689

IF: 3.8

2017-01-01

Optics Express

Abstract:We demonstrate circular-core 1550 nm single-mode polymer waveguides with a graded-index profile fabricated by commercially available UV-curable epoxies using so-called mosquito method. The relative index difference ∆n of the waveguides was designed to be 0.46% in order to guarantee both single-mode operation and good compatibility with standard single-mode fiber. Accurate refractive index tuning of monomer for core construction was realized by mixing the core and cladding epoxies properly. The core pitch of the waveguides was chosen to be 50 μm to satisfy the requirements for high-density on-board optical interconnects. Both the optical characteristics and high-speed performances of the waveguides were comprehensively studied at 1550 nm. The measured transmission and coupling loss are 0.79 dB/cm and 0.78 dB, respectively. The waveguides exhibit an inter-channel crosstalk as low as -45 dB, and a 3 dB misalignment tolerance larger than ± 4 μm on the input and output facet in both horizontal and vertical directions. NRZ signal at a data rate of 25 Gb/s was transmitted over a 10 cm-long waveguide. There is no obvious degradation on the eye diagram due to the insertion of the waveguide and error free transmission was successfully obtained. Our results imply that the fabricated single-mode polymer waveguides have good potential in high-density and high-speed optical interconnects application.
Structure Optimization of Polymeric Mach-Zehnder Rib Waveguide

Lu Rong-guo,Liu Yong-zhi,Liao Jin-kun,Liao Yi-tao,Han Wen-jie

DOI: https://doi.org/10.1007/s11801-007-6118-z

2007-01-01

Abstract:A systematic analysis of the polymeric Mach-Zehnder rib waveguide is presented based on the calculation and optimization. The simulation is carried out with the Effective Index Method (EIM) and two-dimensional (2-D) Finite Difference Beam Propagation Method (FD-BPM). The large refractive index step between the consecutive polymer layers is reduced by using EIM and thus the precision of the calculation is ensured. The important parameters of the waveguide such as Y-junction angle and the separation gap are discussed and their relationships with the optical power propagation and the loss characteristics are investigated in this paper. The total loss of the optimized structure is 0.258 dB.
Optimization of the Mach-Zehnder modulator using polymer asymmetric rib waveguide

Yuan Gao,Xiaoxia Zhang,Ping Sun,Jinkun Liao,ShangJian Zhang,Yong Liu

DOI: https://doi.org/10.1016/j.optcom.2012.07.097

IF: 2.4

2012-01-01

Optics Communications

Abstract:In order to shorten the branch length of Mach–Zehnder modulator, the asymmetric rib waveguide was researched in Mach–Zehnder electro–optic polymer modulator. Full vector finite difference beam propagation method was applied to analyze systematically their transmission loss with different parameters. The structure was optimized by choosing optimal design solution such as the rib width w=4μm, the branch height g=11μm, the outer slab width of core layer in bending waveguide s=2μm and the length of the sine-bending waveguide L1=350μm. The results show that if symmetric rib waveguide is replaced by asymmetric rib waveguide, the length of branch waveguide could be reduced by 30% under the same conditions of transmission loss. The results will have a certain reference value to the design of polymer optical waveguide in M–Z modulator.
Development of Polymer Optical Waveguides for On-Board High-Speed Optical Interconnects

Zuyuan He,Xiao Xu,Lin Ma

DOI: https://doi.org/10.1364/oedi.2018.os4a.1

2018-01-01

Abstract:We demonstrate polymer optical waveguides and devices for on-board high-speed optical interconnects applications. High-speed performances of meter-scale multimode waveguides operating at 850 nm and single-mode waveguides and functional devices operating at 1550 nm are reported.

Effect of Sidewall Roughness on Polymer Waveguide for Optical Interconnects Application

Investigation On Roughness-Induced Scattering Loss Of Small-Core Polymer Waveguides For Single-Mode Optical Interconnect Applications

Investigation of Roughness Induced Scattering Loss of Polymer Waveguides for Optical Printed Circuit Board Application.

Roughness-induced Radiation Losses in Optical Micro or Nanofibers.

Fabrication and Performance Analysis of Polymer Waveguides for Optical Interconnects

Reduction of Sidewall Roughness, Insertion Loss and Crosstalk of Polymer Arrayed Waveguide Grating Using Vapor-Redissolution Technique

Loss and Bandwidth Studies on Multimode Polymer Waveguide Components for On-Board High-Speed Optical Interconnects

Optimization Design for Polymeric S-shaped Ridge Waveguide

Practical Evaluation of Polymer Waveguides for High-Speed and Meter-Scale On-Board Optical Interconnects

Fabrication and Performance Evaluation of Polymer Waveguides for Optical Printed Circuit Board Applications

Single-mode Polymer Waveguides and Devices for High-Speed On-Board Optical Interconnect Application

Steam-Redissolution Technique for Reduction of Polymer/Si Arrayed Waveguide Grating Loss

Measurements and Modeling of Atomic-Scale Sidewall Roughness and Losses in Integrated Photonic Devices

Optimized Inductively Coupled Plasma Etching for Poly(Methyl-Methacrylate-Glycidly-Methacrylate) Optical Waveguide

Effects of surface roughness on lossy rectangular waveguide

Analysis and Optimization of Sidewall Roughness on Microwave Performance of Through-Glass Vias in 3-D Integrated Circuits

Influence of Non-Trapezoidal Cross Section on Polarization Characteristics and Leakage Loss of LNOI Ridge Waveguide

Circular-core Single-Mode Polymer Waveguide for High-Density and High-Speed Optical Interconnects Application at 1550 Nm

Structure Optimization of Polymeric Mach-Zehnder Rib Waveguide

Optimization of the Mach-Zehnder modulator using polymer asymmetric rib waveguide

Development of Polymer Optical Waveguides for On-Board High-Speed Optical Interconnects