Abstract:On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear integrated photonic platforms still feature propagation losses orders of magnitude higher than in standard optical fiber. The tight confinement and high index contrast of integrated waveguides make them highly susceptible to fabrication induced surface roughness. Therefore, microresonators with ultra-high Q factors are, to date, only attainable in polished bulk crystalline, or chemically etched silica based devices, that pose however challenges for full photonic integration. Here, we demonstrate the fabrication of silicon nitride ($\mathrm{Si_3N_4}$) waveguides with unprecedentedly smooth sidewalls and tight confinement with record low propagation losses. This is achieved by combining the photonic Damascene process with a novel reflow process, which reduces etching roughness, while sufficiently preserving dimensional accuracy. This leads to previously unattainable \emph{mean} microresonator Q factors larger than $5\times10^6$ for tightly confining waveguides with anomalous dispersion. Via systematic process step variation and two independent characterization techniques we differentiate the scattering and absorption loss contributions, and reveal metal impurity related absorption to be an important loss origin. Although such impurities are known to limit optical fibers, this is the first time they are identified, and play a tangible role, in absorption of integrated microresonators. Taken together, our work provides new insights in the origins of propagation losses in $\mathrm{Si_3N_4}$ waveguides and provides the technological basis for integrated nonlinear photonics in the ultra-high Q regime.

Roughness-induced Radiation Losses in Optical Micro or Nanofibers.

Modeling bending losses of optical nanofibers or nanowires.

Recent Progress in Optical Micro/Nanofiber Technology

Glass Nanofibers for Micro- and Nano-Scale Photonic Devices

Brief Introduction to Optical Microfibers and Nanofibers

Micro/Nanofibre Optical Sensors: Challenges and Prospects

Optical loss measurements in femtosecond laser written waveguides in glass

Ultra-Long Subwavelength Micro/Nanofibers with Low Loss

Optical microfibers and their applications

Subwavelength-diameter optical fibers: waveguiding properties and photonic applications

Properties Of Mnfs: Experimental Investigations

High-power Continuous-Wave Optical Waveguiding in a Silica Micro/nanofibre.

Parallel Fabrication of Silica Optical Microfibers and Nanofibers

10-W-level CW waveguiding in an optical micro/nanofiber

Loss Reduction in Sharply Bent Optical Nanofibers by Coupling with Au Nanoparticles

Modeling endface output patterns of optical micro/nanofibers.

Nanofiber-Induced Losses Inside an Optical Cavity

Near-Field Characterization of Optical Micro/Nanofibres

An Ab Initio, Fully Coherent, Semi-Analytical Model of Surface-Roughness-Induced Scattering

Bending Loss in Mid-Infrared Waveguides and Fibers

Probing the loss origins of ultra-smooth $\mathrm{Si_3N_4}$ integrated photonic waveguides