Bionic PDMS-CDs Surface with Thermal Controllable Adhesion

Xudong Li,Pei Chen,Fei Qin,Xiaoxiao Dong,Quan Xu
DOI: https://doi.org/10.1016/j.matlet.2019.127267
IF: 3
2019-01-01
Materials Letters
Abstract:In the process of temporary bonding and debonding of a thin wafer, it is necessary to ensure that the bonding layer has reliable adhesion property, and the adhesion process should be controllable for debonding. We propose a wafer bonding layer based on gecko-inspired bionic adhesion structure, which is composed of carbon quantum dots (CDs) and polydimethylsiloxane (PDMS), and has a single-layer micro-pillar array on the surface. Compared with the adhesion layer made from pure PDMS, the PDMS-CDs surface can greatly improve the adhesion strength. Moreover, doped CDs makes the bionic surface sensitive to temperature, therefore, its surface adhesion is controllable by varying temperature. With the increase in temperature, the surface adhesion decreases significantly, which makes debonding possibly. In this study, the surface adhesion properties of PDMS-CDs were studied at both millimeter and nanometer scale under variable temperature conditions. (C) 2019 Elsevier B.V. All rights reserved.
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