Abstract:Surface metrology is an essential operation to determine whether the quality of manufactured surfaces meets the design requirements. In order to improve the surface accuracy and machining efficiency in the manufacturing of optical freeform surfaces, in-situ surface measurement without re-positioning the workpiece is considered as a promising technique in advanced manufacturing. In this study, a displacement laser scanner is integrated into an ultra-precision fly-cutting machine in order to perform as a coordinate measuring machine. However, some inevitable errors such as motion errors of the machine tool, thermal drift, vibrations, and errors of the laser sensor are introduced due to the manufacturing environment. To improve the performance of the measurement system, calibration of the main error sources is investigated with consideration of the characteristics of the built laser scanner system. Hence, the relationship between the moving speed of the laser scanner and the vibration of the tested signals is studied. Following that, the errors of the z-axis scale could be corrected by measuring a four-step heights artefact. Furthermore, volumetric positioning errors are identified by the proposed modified chi-square method and Gaussian processing prediction method. Simulation and measurement experiments are conducted, and the results indicate that the calibrated measuring system can measure ultra-precision freeform surfaces with micrometre form accuracy.

Model Calibration by Multi-Null Constraint for an Optical Freeform Surface Adaptive Interferometer

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Model-Based Phase-Shifting Interferometer

Model-based phase shifting interferometry.

Non-null interferometric aspheric testing with partial null lens and reverse optimization

Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Reverse Optimization Reconstruction Method in Non-Null Aspheric Interferometry

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Non-null Annular Subaperture Stitching Interferometry for Aspheric Testing

Determination of Aspheric Vertex Radius of Curvature in Non-Null Interferometry

Calibration Method for High-Accuracy Measurement of Long Focal Length with Talbot Interferometry.

Adaptive Interferometric Null Testing for Unknown Freeform Optics Metrology.

A Weighted Least Square Based Data Fusion Method for Precision Measurement of Freeform Surfaces

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Self-calibration of in Situ Monoscopic Deflectometric Measurement in Precision Optical Manufacturing.

Fiducial-aided Calibration of a Displacement Laser Probing System for In-Situ Measurement of Optical Freeform Surfaces on an Ultra-Precision Fly-Cutting Machine.

A Novel Camera Calibration Method Based on Multiple Calibration Planes

A calibration approach for installation error of multi-axis laser interferometer