Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining

Enrico Casamenti,Sacha Pollonghini,Yves Bellouard

DOI: https://doi.org/10.1364/OE.435163

IF: 3.8

2021-10-14

Optics Express

Abstract:Enrico Casamenti, Sacha Pollonghini, Yves Bellouard Advanced three-dimensional manufacturing techniques are triggering new paradigms in the way we design and produce sophisticated parts on ... [Opt. Express 29, 35054-35066 (2021)]

optics

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Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Koji Sugioka,Jian Xu,Dong Wu,Yasutaka Hanada,Zhongke Wang,Ya Cheng,Katsumi Midorikawa

DOI: https://doi.org/10.1039/c4lc00548a

IF: 7.517

2014-01-01

Lab on a Chip

Abstract:Femtosecond laser micromachining can directly fabricate three-dimensional (3D) microfluidic devices integrated with functional microcomponents in glass microchips.
3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Agnė Butkutė,Linas Jonušauskas

DOI: https://doi.org/10.3390/mi12050499

2021-04-28

Abstract:The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namely glasses and crystals. This review is dedicated to overviewing the significant advances in the field. First, the underlying physical mechanism of material interaction with ultrashort pulses is discussed, highlighting how it can be exploited for volumetric, high-precision 3D processing. Next, three distinct transparent material modification types are introduced, fundamental differences between them are explained, possible applications are highlighted. It is shown that, due to the flexibility of fs pulse fabrication, an array of structures can be produced, starting with nanophotonic elements like integrated waveguides and photonic crystals, ending with a cm-scale microfluidic system with micro-precision integrated elements. Possible limitations to each processing regime as well as how these could be overcome are discussed. Further directions for the field development are highlighted, taking into account how it could synergize with other fs-laser-based manufacturing techniques.
Femtosecond Laser 3D Microfabrication with Single Exposure or 1D Scanning

Yan Li,Dong Yang,Qian Zhang,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1364/assl.2019.jw2a.52

2019-01-01

Abstract:Femtosecond laser microfabrication of a 3D microstructure with single-exposure or 1D scanning is realized by the 3D focal field intensity engineering. The two rapid techniques can be switched to fabricate a complex microstructure.
High Precision Microscale 3D Manufacturing of Ultra Low Expansion Glass by Femtosecond Selective Laser Etching

Enrico Casamenti,Alessandro Bruno,Pietro Bernasconi,Andrea Lovera

2024-06-28

Abstract:Due to its exceptional dimensional stability in harsh thermal conditions and excellent mechanical and optical properties, Corning ultra-low expansion (ULE) glass is the material of choice in many high-demanding fields such as aerospace, astronomy, and advanced optics. This material has recently attracted renewed attention with the advent of femtosecond laser technology, with a particular focus on the interaction of ultrafast pulses and the material itself. Phenomena like the formation of self-assembled nanogratings and their thermal stability as well as the darkening of laser-affected zones have then been characterized. This paper presents how to exploit femtosecond selective laser etching (SLE) techniques to manufacture truly three-dimensional (3D) components. To demonstrate the micron-scale accuracy and repeatability of this process from the mm- to the cm-size range, various devices are designed and fabricated: fiber hole arrays with different hole densities, sizes, orientations, and shapes; and fiber V-groove arrays. Additionally, a mechanical flexural fiber mount is presented as an example of how multiple functionalities can be monolithically integrated into a single piece of glass through SLE technology. An example of a passive alignment substrate for optical components is also shown. SLE technique represents a new advancement in the field of microscale manufacturing, enabling the scalable production of custom-designed ULE glass structures with unprecedented precision and complexity, paving the way for the miniaturized integration of highly stable components.

Optics,Applied Physics
Rapid Femtosecond Laser 3D Microfabrication Using Focal Field Engineering

Yan Li,Dong Yang,Lipu Liu,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1364/cleo_si.2019.sf3g.6

2019-01-01

Abstract:We realize the single-exposure and the single-scan femtosecond laser microfabrication of 3D microstructures by the 3D focal field intensity engineering. The two rapid techniques are further integrated to fabricate a microstructure. © 2019 The Author(s)
Aberration-free three dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Peng Wang,Wei Chu,Wenbo Li,Yuanxin Tan,Jia Qi,Yang Liao,Zhanshan Wang,Ya Cheng

DOI: https://doi.org/10.1364/OL.43.003485

2018-05-11

Abstract:We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three dimensional microprocessing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 0.25 mm and 9 mm without any aberration correction.

Optics
Three-dimensional femtosecond laser processing for lab-on-a-chip applications

Felix Sima,Koji Sugioka,Rebeca Martínez Vázquez,Roberto Osellame,Lóránd Kelemen,Pal Ormos

DOI: https://doi.org/10.1515/nanoph-2017-0097

IF: 7.5

2018-02-23

Nanophotonics

Abstract:Abstract The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the laser wavelength. More importantly, focusing the femtosecond laser beam inside the transparent materials confines the nonlinear interaction only within the focal volume, enabling three-dimensional (3D) micro- and nanofabrication. This 3D capability offers three different schemes, which involve undeformative, subtractive, and additive processing. The undeformative processing preforms internal refractive index modification to construct optical microcomponents including optical waveguides. Subtractive processing can realize the direct fabrication of 3D microfluidics, micromechanics, microelectronics, and photonic microcomponents in glass. Additive processing represented by two-photon polymerization enables the fabrication of 3D polymer micro- and nanostructures for photonic and microfluidic devices. These different schemes can be integrated to realize more functional microdevices including lab-on-a-chip devices, which are miniaturized laboratories that can perform reaction, detection, analysis, separation, and synthesis of biochemical materials with high efficiency, high speed, high sensitivity, low reagent consumption, and low waste production. This review paper describes the principles and applications of femtosecond laser 3D micro- and nanofabrication for lab-on-a-chip applications. A hybrid technique that promises to enhance functionality of lab-on-a-chip devices is also introduced.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Aberration-insensitive Three-Dimensional Micromachining in Glass with Spatiotemporally Shaped Femtosecond Laser Pulses.

Peng Wang,Wei Chu,Wenbo Li,Yuanxin Tan,Jia Qi,Yang Liao,Zhanshan Wang,Ya Cheng

DOI: https://doi.org/10.1364/ol.43.003485

IF: 3.6

2018-01-01

Optics Letters

Abstract:We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional microprocessing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 μm and 9 mm without any aberration correction.
Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

Peng Wang,Wei Chu,Wenbo Li,Yuanxin Tan,Fang Liu,Min Wang,Zhe Wang,Jia Qi,Jintian Lin,Fangbo Zhang,Zhanshan Wang,Ya Cheng

DOI: https://doi.org/10.48550/arXiv.1904.04027

2019-02-11

Abstract:Three-dimensional (3D) printing has allowed for production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansions in terms of materials, functionalities, as well as areas of application. When attempting to print 3D microstructures in glass, femtosecond laser induced chemical etching (FLICE) has proved itself a powerful approach. Here, we demonstrate fabrication of macro-scale 3D glass objects of large heights up to ~3.8 cm with a well-balanced (i.e., lateral vs longitudinal) spatial resolution of ~20 {\mu}m. The remarkable accomplishment is achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica which results in aberration-free focusing of the laser pulses deeply inside fused silica.

Applied Physics
Femtosecond Laser Nanomachining of High‐Aspect‐Ratio Channels in Bulk Fused Silica (Adv. Mater. Technol. 18/2024)

Pasquale Barbato,Roberto Osellame,Rebeca Martínez Vázquez

DOI: https://doi.org/10.1002/admt.202470085

IF: 6.8

2024-09-19

Advanced Materials Technologies

Abstract:Femtosecond Laser Nanomachining In article number 2400240, Rebeca Martínez Vázquez, Pasquale Barbato, and Roberto Osellame present a novel fabrication regimen that is exploited to break the micrometer resolution limit of femtosecond laser micromachining in glass, by demonstrating long‐empty channels with nanometric diameter. The irradiation and etching conditions give rise to unprecedented light‐matter interaction outcomes that are explored thoroughly in this work. This process will pave the way for a remarkable advance in integrated nanophotonics and nanofluidics.

materials science, multidisciplinary
Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

M.S. Giridhar,Kibyung Seong,Axel Schülzgen,Pramod Khulbe,Nasser Peyghambarian,Masud Mansuripur

DOI: https://doi.org/10.1364/AO.43.004584

2017-08-28

Abstract:We describe a technique for surface and sub-surface micro-machining of glass substrates using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. Although silicate glass is normally transparent at this wavelength, the extremely high intensity of the focused beam causes multi-photon absorption, resulting in localized ablation of the glass substrate. Ablation is strictly confined to the vicinity of focus, leaving the rest of the substrate unaffected. We exploit this phenomenon to drill a micro-hole through a thin vertical wall that separates two adjacent pits machined by the same laser in a glass plate. A salient feature of pulsed laser micro-machining, therefore, is its ability to drill sub-surface tunnels and canals into glass substrates, a process that requires multiple steps in standard lithography. To demonstrate a potential application of this micro-machining technique, we have fabricated simple micro-fluidic structures on a glass plate. To prevent the evaporation of liquids in open micro-channels and micro-chambers thus fabricated requires a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate. This point-to-point contacting is essential if the fluids are to remain confined within their various channels and chambers on the chip, without leaking into neighboring regions. Methods of protecting and sealing the micro-machined structures for microfluidic applications are also discussed.

Applied Physics
Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

WANG Peng,QIAO LingLing,LIN JinTian,HE Fei,LIAO Yang,CHENG Ya

DOI: https://doi.org/10.1360/n972015-00863

2015-01-01

Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.
Recent Research Progress on Femtosecond Laser Induced Microstructures in Glasses

Yu Teng,Jiajia Zhou,Geng Lin,Fangfang Luo,Shifeng Zhou,Jianrong Qiu

DOI: https://doi.org/10.1080/15599612.2012.688930

2012-01-01

International Journal of Optomechatronics

Abstract:The availability of laser pulses with femtosecond duration allows materials to be subjected to higher light intensity than ever before, opening the door to the study of laser / material interactions in a new regime. Various microstructures induced by femtosecond laser have been reported, such as color centers, voids, and refractive index change. In this article, we review our recent research findings on the femtosecond laser induced microstructures in glasses, which are not only helpful for understanding the interaction process between the ultrafast laser and the glassy materials, but also valuable for the fabrication of integrated optical elements.
Femtosecond laser irradiation for functional micro-/nanostructure fabrication

minghui hong,zaichun chen,min tang,luping shi,t c chong

DOI: https://doi.org/10.1109/CLEOPR.2009.5292198

2009-01-01

Abstract:Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning.
Advanced 3D micromachining techniques using UV laser sources

C. Molpeceres,S. Lauzurica,J.J. García-Ballesteros,M. Morales,J.L. Ocaña

DOI: https://doi.org/10.1016/j.mee.2007.01.071

IF: 2.3

2007-05-01

Microelectronic Engineering

Abstract:Laser systems have been widely applied in the last 20 years in semiconductor industry in microfabrication process development, the current availability of new excimer and diode pumped solid state lasers (DPSS) sources are broadening the applications fields of laser microprocessing. Nowadays MEMs, fluidic devices, advanced sensors and biomedical devices and instruments are among the most promising developments of this technology. In this work we present the main features and potential applications of a fully automated 3D laser micromachining workstation based on the main concept of geometrical flexibility. This system integrates two UV laser sources, excimer and DPSS in ns pulse regime, and an advanced positioning system (with six degrees of freedom) for complex parts machining. Different process developments, ranging from pure planar applications to fully 3D parts machining, are also presented.

engineering, electrical & electronic,nanoscience & nanotechnology,optics,physics, applied
Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching

Yuki Kondo,Jianrong Qiu,Tsuneo Mitsuyu,Kazuyuki Hirao,Toshinobu Yoko

DOI: https://doi.org/10.1143/JJAP.38.L1146

1999-01-01

Abstract:We demonstrate the three-dimensional microdrilling of glass by the multiphoton process with nonresonant femtosecond laser pulses and by the subsequent chemical etching. We use photomachinable glass which is sensitive to cw UV light of a wavelength shorter than 320 nm. After the focused irradiation of nonresonant femtosecond laser pulses at 400 nm and subsequent heat treatment, crystallites of Li(2)O . SiO(2), which are more soluble in dilute hydrofluoric acid than matrix glass, precipitate in the focused area of the laser within the glass sample. After etching the crystallites, three-dimensional holes are formed in the glass sample. We produce straight and Y-branched holes in the glass sample. This technique can be applied to the fields of microoptics, microelectronics and microchemicals.
Ultrafast laser processing of materials: from science to industry

Mangirdas Malinauskas,Albertas Žukauskas,Satoshi Hasegawa,Yoshio Hayasaki,Vygantas Mizeikis,Ričardas Buividas,Saulius Juodkazis

DOI: https://doi.org/10.1038/lsa.2016.133

2016-03-14

Light: Science and Applications

Abstract:Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific, technological and industrial potential. In ultrafast laser manufacturing, optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions. Control of photo-ionization and thermal processes with the highest precision, inducing local photomodification in sub-100-nm-sized regions has been achieved. State-of-the-art ultrashort laser processing techniques exploit high 0.1–1 μm spatial resolution and almost unrestricted three-dimensional structuring capability. Adjustable pulse duration, spatiotemporal chirp, phase front tilt and polarization allow control of photomodification via uniquely wide parameter space. Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second, leading to a fast lab-to-fab transfer. The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput. Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.
Femtosecond laser micromachining and microfabrication in transparent materials

Yan Li,Dayong Liu,Fengjie Qi,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1117/12.756355

2008-01-01

Abstract:We have realized three-dimensional micromachining and microfabrication in transparent materials with femtosecond laser pulses, including water-assisted drilling by ablation, hologram encoding by microexplosion, waveguide writing by refractive index increase, and nanoline and nanotip polymerization via two-photon absorption. With the water-assisted drilling, we showed that not only longitudinal holes in the laser beam propagation direction but also transverse holes perpendicular to laser beam could be drilled when the sample's rear surface was in contact with water. True three-dimensional microchannels and microchambers were fabricated. In addition, three-dimensional cutting of glass was realized with the water assistance. By using tightly focused pulse to induce microexplosion, permanent computer-generated holograms were directly written inside glass and the stored data were reconstructed by a He-Ne laser beam. A waveguide array was written inside glass by the laser induced refractive index increase, and coupling between these waveguides was observed. Nanoline and nanotips with sub-30nm feature-size were fabricated using resin SCR500 by two-photon photopolymerization.
Femtosecond laser microfabrication of micro-optic elements in glass

Yan Li,Hongbing Jiang,Hong Yang,Qihuang Gong

IF: 2.56

2005-01-01

Chinese Optics Letters

Abstract:Micro-optic elements have been fabricated in silica and soda-lime glass with femtosecond laser pulses. The dependence of refractive index change on pulse duration, pulse energy and scan passes is investigated and a Fresnel zone plate is induced. A permanent computer-generated hologram encoded by the detour phase method is directly written by microexplosion. The stored image is reconstructed with a collimated He-Ne laser beam. Three-dimensional microchannels are drilled by water-assisted ablation. At low incident pulse energy, only one transverse microhole is observed. At high incident pulse energy, multiple transverse microholes are simultaneously drilled.

Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Femtosecond Laser 3D Microfabrication with Single Exposure or 1D Scanning

High Precision Microscale 3D Manufacturing of Ultra Low Expansion Glass by Femtosecond Selective Laser Etching

Rapid Femtosecond Laser 3D Microfabrication Using Focal Field Engineering

Aberration-free three dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Three-dimensional femtosecond laser processing for lab-on-a-chip applications

Aberration-insensitive Three-Dimensional Micromachining in Glass with Spatiotemporally Shaped Femtosecond Laser Pulses.

Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

Femtosecond Laser Nanomachining of High‐Aspect‐Ratio Channels in Bulk Fused Silica (Adv. Mater. Technol. 18/2024)

Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Recent Research Progress on Femtosecond Laser Induced Microstructures in Glasses

Femtosecond laser irradiation for functional micro-/nanostructure fabrication

Advanced 3D micromachining techniques using UV laser sources

Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching

Ultrafast laser processing of materials: from science to industry

Femtosecond laser micromachining and microfabrication in transparent materials

Femtosecond laser microfabrication of micro-optic elements in glass