Development Of A Compact And Cost Effective Msl System Based On A Compliant Nanomanipulator

Zheng Liu,Zhen Zhang,Yingchun Guan
DOI: https://doi.org/10.1115/detc2019-97522
2020-01-01
Abstract:This paper proposes a compact and cost-effective MSL (Micro Stereo Lithography) prototyping system. A self-developed compliant XY nanomanipulating stage is responsible for the fabrication quality in one layer. And a blu-ray LED laser module is utilized as a cost-effective light source. The experimental results show that the MSL prototyping system is capable of achieving --, 2 pm cured width for circular patterns.
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