A novel WOx-based memristor with a Ti nano-island array

Zhaozhu Qu,Baolin Zhang,Changfang Li,Yuntao Peng,Liping Wang,Qixin Li,Zhaohui Zeng,Jianghui Dong
DOI: https://doi.org/10.1016/j.electacta.2021.138123
IF: 6.6
2021-05-01
Electrochimica Acta
Abstract:<p>A novel WO<sub>x</sub>-based memristor with Ti nano-island arrays was developed in this study. A 100 nm thick Pt bottom electrode was deposited, and an ultrathin anodic aluminum oxide (AAO) template was used to obtain the Ti nano-island arrays. The WO<sub>x</sub>/Ti nano-island (NI)/Pt devices were prepared by magnetron sputtering using a WO<sub>y</sub> (y=2.7–2.9) target to obtain a 30 nm deposition layer of WO<sub>x</sub>. Scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and semiconductor analysis confirmed that the WO<sub>x</sub>-based memristor could be successfully produced with a highly ordered Ti nano-island array. The size and density of the NIs could be controlled by selecting the aperture of the AAO template. The oxygen interaction between the Ti nano-islands and WO<sub>x</sub> led to the creation of oxygen vacancies in their vicinity, resulting in the formation of an oxygen vacancy conductive filament (CF) without the need for a forming process. NIs tend to strengthen the electric field along the bias voltage direction, fostering the generation of the CF. The absolute values of V<sub>SET</sub> and V<sub>RESET</sub> were about 0.19 V and 0.69 V, respectively. Compared with the devices without the Ti NI arrays, the variation coefficients of V<sub>SET</sub> and V<sub>RESET</sub> of the WO<sub>x</sub>/Ti NI/Pt devices were reduced by about 84.9% and 83.7%, respectively. With smaller and more concentrated V<sub>SET</sub> and V<sub>RESET</sub>, the WO<sub>x</sub>/Ti NIs/Pt device showed a significantly improved switching stability.</p>
electrochemistry
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