Ethylene Glycol Assisted Hydrothermal Synthesis of Molybdenum Disulfide for MEMS Humidity Sensor

Xiaohui Leng,Yiming Wang,Fei Wang
DOI: https://doi.org/10.1109/memsys.2019.8870654
2019-01-01
Abstract:In this paper, we have realized the ethylene glycol assisted hydrothermal synthesis of molybdenum disulfide (MoS2) with tunable oxygen doping by the adjustment of reaction temperature and applied in humidity sensing with enhanced performance. The addition of ethylene glycol (EG) results in a small flake size and rich oxygen doping site in MoS2. This defect-rich structure brings benefits to the humidity sensing property. The influence of temperature is also studied and the proper temperature for the synthesis turns out to be 200 °C.
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