Self-Assembled Nanochamber Arrays for in-situ TEM Observation of Liquid-Phase Samples

Kitaek Lim,Yuna Bae,Kihwan Kim,Sungho Jeon,Byung Hyo Kim,Jungwon Park,Won Chul Lee
DOI: https://doi.org/10.1109/MEMSYS.2019.8870760
2019-01-01
Abstract:This work presents a highly-ordered array of nanoscale chambers, capable of encapsulating liquid samples for TEM (transmission electron microscopy) imaging. The present nanochambers are formed with two layers of free-standing graphene and self-assembled nanopores in an AAO (anodic aluminum oxide) membrane, which improve a transparency for electron beam and uniformities in chamber sizes/distributions, respectively. We envision that the present work will enable us to efficiently observe nanoscale processes in liquid with high-resolution TEM.
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