Electrostatic layer-by-layer nano-assembly: films, cantilevers, micropatterns, and nanocapsules

dinesh s kommireddy,jingshi shi,xiaodong yan,haifeng ji,yuri m lvov
DOI: https://doi.org/10.1117/12.568046
2005-01-01
Abstract:Layer-by-layer (LbL) nanoassembly in combination with traditional lithography and microfluidics was applied for the fabrication of ultrathin microcantilevers and for the modification of microchannel surface. Hundreds of cantilevers were fabricated on a silicon wafer simultaneously. The purpose is to develop chemical/biosensor arrays for parallel, massive data gathering. Microcantilever optical deflections were measured using a four-quadrant AFM head with integrated laser and position sensitive detector. In the second part, laminar flow fabrication of interpolyelectrolyte complexes was studied inside a microchannel. Polyelectrolyte micropatterns were studied using fluorescent confocal microscopy. Filament like, 15 mu m, interpolyelectrolyte microstripes were formed at flow rate higher than 0.01 mL(.)min(-1) and concentrations of the initial polyelectrolytes below 1 mg(.)mL(-1). New, soft micropatterning technique for the anisotropic modification of polyelectrolyte nanocapsules was also demonstrated. The microchannel surface was made sensitive to pH by coating the surface of the channel with a pH sensitive dye using LbL assembly to control the reaction.
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