Abstract:Two-dimensional (2D) diffractive gratings offer a polarization-independent coupling solution between optical fibers and photonic integrated circuits, with advantages including placement flexibility, ease of fabrication, and tolerance to alignment errors. In this work, we proposed and experimentally demonstrated a highly efficient 2D grating coupler fabricated with 193-nm deep-ultraviolet (DUV) lithography on the 220-nm silicon-on-insulator (SOI) platform. An experimental peak coupling efficiency of -2.54 dB can be obtained using a minimum feature size of 180 nm, relying on the novel double-layer 2D grating structure. The proposed 2D waveguide grating is composed of a 70-nm shallow-etched hole array and a 160-nm-thick deposited polycrystalline silicon tooth array. The demonstrated design exhibits a 3-dB bandwidth of 23.4 nm with good positioning tolerance for optical fibers. Due to the benefits of perfectly vertical coupling configuration, the measured polarization-dependent loss in experiments is below 0.3 dB within the 3-dB working bandwidth. Our proposed double-layer 2D gratings can also be applied to other integrated optics platforms, where the grating directionality can be enhanced by optimizing the front-end-of-line process to break the vertical symmetry, thus enabling an efficient and polarization-independent coupling between optical fibers and photonic chips.

Compact Silicon-Based Polarization-Independent Directional Coupler Using Subwavelength Gratings.

Broadband Polarization-Independent Directional Coupler Using Asymmetric-Waveguides

Compact Polarization Splitter Based on Silicon Grating-Assisted Couplers

Polarization-independent Fiber-Chip Grating Couplers Optimized by the Adaptive Genetic Algorithm.

Subwavelength-grating-assisted Broadband Polarization-Independent Directional Coupler.

Direct-binary-search-optimized Compact Silicon-Based Polarization Beam Splitter Using a Pixelated Directional Coupler

A Compact and Polarization-Insensitive Silicon Waveguide Crossing Based on Subwavelength Grating MMI Couplers

High-extinction-ratio Silicon Polarization Beam Splitter with Tolerance to Waveguide Width and Coupling Length Variations.

Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency

Ultra-compact Polarization-Independent Directional Couplers Utilizing a Subwavelength Structure.

Cmos-Compatible High Efficiency Polarization Splitting Grating Coupler Near 1310Nm

Broad Bandwidth and Large Fabrication Tolerance Polarization Beam Splitter Based on Multimode Anti-Symmetric Bragg Sidewall Gratings

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Ultra-compact and Low-Loss Silicon Polarization Beam Splitter Using a Particle-Swarm-optimized Counter-Tapered Coupler.

High-Efficiency and Polarization-Insensitive Grating Couplers on Thin-Film Lithium Niobate Waveguides

Design of a Polarization Insensitive Triplexer Using Directional Couplers Based on Submicron Silicon Rib Waveguides

Broadband Polarization-Independent Edge Couplers With High Efficiency Based on SiN-Si Dual-Stage Structure

Subwavelength TE/TM Grating Coupler Based on Silicon-on-insulator

Compact and broadband dual-polarization waveguide crossing utilizing subwavelength-hole-assisted MMI couplers

Experimental Demonstration of Efficient and Polarization-Diversity Fiber-Chip Coupling by 2D Grating Couplers with 193-nm DUV Lithography