Abstract:The use of trivalent erbium (Er$^{3+}$), typically embedded as an atomic defect in the solid-state, has widespread adoption as a dopant in telecommunications devices and shows promise as a spin-based quantum memory for quantum communication. In particular, its natural telecom C-band optical transition and spin-photon interface makes it an ideal candidate for integration into existing optical fiber networks without the need for quantum frequency conversion. However, successful scaling requires a host material with few intrinsic nuclear spins, compatibility with semiconductor foundry processes, and straightforward integration with silicon photonics. Here, we present Er-doped titanium dioxide (TiO$_2$) thin film growth on silicon substrates using a foundry-scalable atomic layer deposition process with a wide range of doping control over the Er concentration. Even though the as-grown films are amorphous, after oxygen annealing they exhibit relatively large crystalline grains, and the embedded Er ions exhibit the characteristic optical emission spectrum from anatase TiO$_2$. Critically, this growth and annealing process maintains the low surface roughness required for nanophotonic integration. Finally, we interface Er ensembles with high quality factor Si nanophotonic cavities via evanescent coupling and demonstrate a large Purcell enhancement (300) of their optical lifetime. Our findings demonstrate a low-temperature, non-destructive, and substrate-independent process for integrating Er-doped materials with silicon photonics. At high doping densities this platform can enable integrated photonic components such as on-chip amplifiers and lasers, while dilute concentrations can realize single ion quantum memories.

Absorption and Gain Saturable Nonlinearities in Erbium-Doped Optical Microcavities

Defect-induced tuning from reverse saturable absorption to saturable absorption in pristine and rare-earth-substituted MnCO 3 microspheres

Laser-induced spectral broadening and hole-burning in rare earth doped crystals and coherent optical spectroscopy for frequency upconversion

Ultranarrow linewidth and high gain of an optical cavity with enhanced self-Kerr nonlinearity in quantum dot molecules

Microcavity Nonlinear Optics with an Organically Functionalized Surface

Nonlinear optical property of a Bi-doped GaAs semiconductor saturable absorber.

Nanoscale nonlinear effects in Erbium-implanted Yttrium Orthosilicate

Excited-state Nonlinear Absorption and Its Application in Photonic Technology

Nanocavity-mediated Purcell enhancement of Er in TiO$_2$ thin films grown via atomic layer deposition

Observation of Nonlinear Transmission Enhancement in Cavities Filled with Nonlinear Organic Materials.

Microcavity-enhanced Surface Nonlinear Optics

Optically Unstable Phase from Ion-Ion Interactions in an Erbium-Doped Crystal

Ultrafast and Large Optical Nonlinearity of a TiSe2 Saturable Absorber in the 2 Μm Wavelength Region

Optimization of the cavity length and pulse characterization based on germanene as a saturable absorber in an Er-doped fiber laser

Nonlinear Negative Transmittance at A Cw 980-Nm Laser Diodes Pumping in Yb3+:Caf2 Nanocrystals-Embedded Glass Ceramics

Erbium Silicate Compound Optical Waveguide Amplifier and Laser [Invited]

Experimental Study of Optical Nonlinearities in A Broadband Semiconductor Saturable Absorber Mirror

High-gain Erbium Silicate Waveguide Amplifier and a Low-Threshold, High-Efficiency Laser.

Inhomogeneous Gain Saturation in EDF: Experiment and Modeling

Optoenergy Storage, Stimulated Processes in Optical Amplification with Electro-Optic Ceramic Gain Media of Nd3+ Doped Lanthanum Lead Zirconate Titanate

Spectroscopic analyses of Er3+/Yb3+ co-doped laser sintering silica glasses