A Novel Capacitive Pressure Sensor Based on Non-Coplanar Comb Electrodes

Zhenyu Liu,Yichen Pan,Pang Wu,Lidong Du,Zhan Zhao,Zhen Fang
DOI: https://doi.org/10.1016/j.sna.2019.07.049
IF: 4.291
2019-01-01
Sensors and Actuators A Physical
Abstract:Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads. Theoretical analysis and finite element simulation analysis based on COM-SOL software verified the feasibility of the proposed structure. The prototype sensor chip is successfully fabricated using only three masks based on a SOI wafer and hermetically sealed at 100 kPa. The fabricated sensor chip is tested to a sensitivity of 17aF/Pa and non-linearity error of 1.37% with the pressure ranged from 0 to 30 kPa. (C) 2019 Elsevier B.V. All rights reserved.
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