Abstract:The measurements of gravity have been widely applied to earthquake monitoring, resource exploration and identification of natural voids. Traditional gravimeters, restricted by the exorbitant price and bulk, are hardly to be utilized in newly developed applications such as AUV-borne gravimetry and the multi-pixels gravimetry. Fortunately, this is changing with the development of portable MEMS gravimeters.Here, we have already developed a relative MEMS gravimeter with a quasi-zero stiffness spring-mass system and an arrayed area-changed capacitor for displacement transducing and actuating. This quasi-zero stiffness spring-mass system transfers the acceleration variation to the displacement of the proof-mass with high sensitivity. The displacement is then detected by the arrayed area-changed capacitor. The spring-mass system was installed inside a vacuum chamber for reducing the thermal noise and environmental disturbances. However, the response time of the gravimeter was enlarged when operating in open-loop mode dues to the decreased air damping. Therefore, a force-balance system is utilized in a MEMS gravimeter to improve the response time and the measurement range. This paper proposes an area-changed capacitors for transducing the displacement and balancing the inertial force on the proof-mass. As no additional structures are required on the MEMS chip, the design of the force-balance system is beneficial to simplifying the fabricating process and avoiding additional noise sources.We calibrated our MEMS gravimeter statically in our cave lab. After linear correction of the drift, the output of the MEMS agrees well with the theoretical earth tide with a coefficient of association of 0.92. The self-noise is evaluated to be 1 μGal/√Hz, which is one of the most sensitive MEMS-based gravimeter reported. In addition, the response time of the MEMS gravimeter was calibrated to be 0.2 s in close-loop mode, which is 2000 times faster than that in open-loop mode. This will promote improved accessibility of mobile gravity measurements at an affordable cost.

A High-Sensitivity MEMS Gravimeter with a Large Dynamic Range

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

A High-Sensitivity Mems Gravimeter Without a Vacuum Chamber

A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift

A Force-Balance MEMS Gravimeter with Area-Changed Capacitors for Transducing and Actuating

A MEMS-BASED GRAVIMETER FOR SIMULTANEOUS VERTICAL AND HORIZONTAL EARTH TIDES MEASUREMENTS

A MEMS GRAVIMETER QUALIFIED FOR EARTH TIDES MEASUREMENT

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A Nineteen Day Earth Tide Measurement with a MEMS Gravimeter

MEMS surface microgravimetry for geotechnical surveying

Design And Simulation Of A Mems Gravimeter For Lunar Missions

A Sensitive Micromachined Resonant Accelerometer for Moving-Base Gravimetry

A review of high-performance MEMS sensors for resource exploration and geophysical applications

Measurement of the earth tides with a diamagnetic-levitated micro-oscillator at room temperature

An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

Continuous Gravity Measurement with a Portable Atom Gravimeter

A vibrating beam MEMS accelerometer for gravity and seismic measurements

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Design and Construction of a Superconducting Gravimeter Prototype

Novel Capacitive Sensing System Design of A Microelectromechanical Systems Accelerometer for Gravity Measurement Applications