A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift

Le Gao,Fangzheng Li,Jian Zhang,Bingyang Cai,Wenjie Wu,Liangcheng Tu
DOI: https://doi.org/10.1109/mems49605.2023.10052380
2023-01-01
Abstract:This paper reports a MEMS gravimeter with a capacitive displacement transducer and a force-balance system for superior response time, self-noise and drift compared to the state-of-the-art. It thus enables, for the first time, the measurements of low-frequency earth tide and high-frequency seismic motion simultaneously. More importantly, MEMS gravimeters with optimized dynamic response are crucial for a further wide field of applications, such as mobile gravity measurements.
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