An Injection Enhanced LIGBT on Thin SOI Layer with Low ON-state Voltage

Gaoqiang Deng,Xiaorong Luo,Diao Fan,Tao Sun,Bo Zhang
DOI: https://doi.org/10.1109/ISPSD.2019.8757637
2019-01-01
Abstract:A Lateral Injection Enhanced Insulated Gate Bipolar Transistor (LIEGT) on thin SOI layer is proposed and investigated by simulations. The LIEGT features a recessed trench at cathode side of the drift region formed by LOCOS process. The LIEGT shows very low loss in the ON-state because the trench suppresses holes being extracted and enhances the electron injection. The saturation current of the LIEGT is 1.4 times that of the conventional LIGBT and the ON-state voltage ( VON) is reduced by 24% at current density of 200A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . The LIEGT exhibits improved trade-off between VON and turn-off loss ( EOFF). For the same EOFF, the VON is decreased by 20% compared with that of the conventional LIGBT. The fabrication of the proposed LIEGT is compatible with the CMOS process.
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