Comparison of microstructures and magnetic properties in FePt alloy films deposited by direct current magnetron sputtering and high power impulse magnetron sputtering

Wen-Sheng Yang,Ta-Huang Sun,Sheng-Chi Chen,Shien-Uang Jen,Han-Jie Guo,Ming-Han Liao,Jiann-Ruey Chen

DOI: https://doi.org/10.1016/j.jallcom.2019.06.216

IF: 6.2

2019-01-01

Journal of Alloys and Compounds

Abstract:Single-layered FePt films of 30 nm thickness with random orientation are produced by direct current magnetron sputtering (DCMS) deposited directly onto Corning 1737 glass substrates and then post-annealed at 700 °C for 30 min. In films produced by high power impulse magnetron sputtering (HiPIMS) however, a strong (001) texture of L10 FePt film with isolated island structure is achieved and presents high perpendicular magnetic anisotropy after post-annealing under the same conditions. This is due to the compressive stress in as-deposited FePt films being enhanced greatly by HiPIMS. The films achieved by HiPIMS possess perpendicular coercivity, saturation magnetization and perpendicular squareness of 14.2 kOe, 620 emu/cm3 and 0.98, respectively, which reveal HiPIMS as a good technique to produce single-layered FePt films with high perpendicular magnetic properties.