Disturbance Rejection in Motor Synchronization

Biao QI,Yang LIU,Yu RAO,Kai WEI,Sheng QIANG
DOI: https://doi.org/10.3969/j.issn.1003-7241.2017.10.032
2017-01-01
Abstract:Dual wafer stages exchanging is the core of developing lithography,the process of stages exchanging requires high speed and precision,so the existence of the disturbance can easily lead to the failure of stages exchanging.In this paper,the disturbance in multi-motor synchronous movement in the Y direction is analyzed and suppressed.Combined with the existing synchronous control strategy,it describes the synchronous control strategy based on disturbance compensation which sets the disturbance observer application at compensation loop,and it also makes some simulation research.Then as for the load disturbance,the paper designs dynamic load disturbance compensation and modifies the synchronization control strategy,its effectiveness is verified by simulation.
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