Low Polarization Dependent Loss Two-Dimensional Grating Coupler

Yanyun Xue,Hao Chen,Yujin Bao,Jianji Dong,Xinliang Zhang
DOI: https://doi.org/10.1364/oe.27.022268
2019-01-01
Abstract:We design and demonstrate a two-dimensional grating coupler (2D GC) with a low polarization dependent loss (PDL) based on the silicon-on-insulator (SOI) platform. Using an elliptical-like etching pattern consisting of two identical semicircles and a rectangle embedded between them, a maximum PDL of the fabricated device is measured to be 0.2 dB covering the C-band, lower than that of most conventional 2D GCs. Besides, a large feature size of 280 nm is beneficial to its manufacturing process and wide application.
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