CMOS-compatible plasmonic hydrogen sensors with a detection limit of 40 ppm.

Song Yue,Yu Hou,Ran Wang,Song Liu,Man Li,Zhe Zhang,Maojing Hou,Yu Wang,Zichen Zhang
DOI: https://doi.org/10.1364/OE.27.019331
IF: 3.8
2019-01-01
Optics Express
Abstract:Sensing of leakage at an early stage is crucial for the safe utilization of hydrogen. Optical hydrogen sensors eliminate the potential hazard of ignition caused by electrical sparks but achieve a detection limit far higher than their electrical counterparts so far. To essentially improve the performance of optical hydrogen sensors in terms of detection limit, we demonstrate in this work a plasmonic hydrogen sensor based on aluminum-palladium (Al-Pd) hybrid nanorods. Arranged into high-density regular arrays, the hybrid nanorods are capable of sensing hydrogen at a concentration down to 40 ppm, i.e., one thousandth of the lower flammability limit of hydrogen in air. Different sensing behaviors are found for two sensor configurations, where Pd-Al nanorods provide larger spectral shift and Al-Pd ones exhibit shorter response time. In addition, the plasmonic hydrogen sensors here utilize exclusively CMOS-compatible materials, holding the potential for real-world, large-scale applications. (c) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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