Large Spin Hall Effect of Perpendicularly Magnetized Β-W/cofeb/mgo Layers with High Thermal Stability

Lezhi Wang,Kewen Shi,Shouzhong Peng,Kaihua Cao,Huaiwen Yang,Jianfeng Gao,Weisheng Zhao,Chao Zhao
DOI: https://doi.org/10.7567/1347-4065/ab0e32
IF: 1.5
2019-01-01
Japanese Journal of Applied Physics
Abstract:We report a robust perpendicularly magnetized beta-W/CoFeB/MgO multilayer structure. For the first time, we demonstrate efficient spin-orbit torque (SOT) switching and a highly thermally stable annealing process with this structure using X-ray diffraction tests, the harmonic technique, and SOT-driven magnetization switching measurements. These results may enable applications of SOT-based magnetic random access memory, which is required for integration in the CMOS back-end-of-line process. (C) 2019 The Japan Society of Applied Physics
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