Realization of Orthogonality in Two-Step Laser Focused Cr Atomic Deposition

Xiao Deng,Jie Liu,Li Zhu,Baowu Zhang,Pengfei He,Xinbin Cheng,Tongbao Li

DOI: https://doi.org/10.1016/j.ijleo.2019.02.023

IF: 3.1

2019-01-01

Optik

Abstract:Two-dimensional nano-gratings hold the advantages of good pitch accuracy for nonlinearity calibration and angle accuracy for orthogonality calibration, however, it is very challenging to transfer an ideal orthogonal angle from macroscale to nanoscale. In this study, we utilize a group of perpendicular mirrors in two-step laser focused Cr atomic deposition technology to fabricate a self-traceable two-dimensional nano-gratings. According to theoretical analysis, the novel method will produce an angle uncertainty of around 10″ for the self-traceable array, which helps to realize good orthogonality in the fabrication of a self-traceable two-dimensional nano-grating standard for nanoscale calibration with high accuracy. At the meanwhile, this orthogonality transfer method proposed holds the advantages of highly uniform orthogonal angles over the whole structure area and are insensitive to alignment of laser beams and pitch differences between two step depositions, which opens a new way to transfer an ideal orthogonal or fixed angle from macroscale to nanoscale with high accuracy, uniformity and stability.