Laser Printer Patterned Sacrificed Layer for Arbitrary Design and Scalable Fabrication of the All-Solid-state Interdigitated In-Planar Hydrous Ruthenium Oxide Flexible Micro Supercapacitors

Kai-Chen Huang,Che-Hsien Lin,K. S. Anuratha,Tsung-Yu Huang,Jeng-Yu Lin,Fan-Gang Tseng,Chien-Kuo Hsieh
DOI: https://doi.org/10.1016/j.jpowsour.2019.02.016
IF: 9.2
2019-01-01
Journal of Power Sources
Abstract:We demonstrate the successful fabrication of all-solid-state flexible micro-supercapacitors (mu SCs) on commercial polyethylene terephthalate (PET) sheet using a commercial laser printer. The interdigitated in-planar electrodes of the mu SC are fabricated by commercial toner cartridge and their self-aligned stacking configurations are made by depositing Pt thin films and hydrous ruthenium oxide (RuO center dot xH(2)O, hRuO(2)) layers on the PET sheets using a post-low-temperature annealing process. The mu SC cells can be combined in parallel or series by an arbitrary printing process operated on a personal computer, thereby avoiding unnecessary external connections and improving the capacitive behavior. The fabricated hRuO(2)-based mu SCs exhibit excellent electrochemical-energy storage, along with ultrahigh volumetric power density (73460 mW cm(-3)) and energy density (24.9 mWh cm(-3)). This facile and simplified strategy constructs mu SCs with tailored self-aligned electrodes of arbitrary design, excellent mechanical stability, and high flexibility. Therefore, it offers a high-productivity, low-cost, photolithography-free microfabrication of mu SCs for microscale supercapacitor applications.
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