Abstract:The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g., bulk-acoustic wave filters with low insertion loss and low noise or fast and reliable MEMS switches. However, the cross-hierarchical modelling of micro-electronic and micro-electromechanical constituents together in one multi-physical design process is still not as established as the design of integrated micro-electronic circuits, such as operational amplifiers. To close the gap between micro-electronics and micro-electromechanics, this paper presents an analytical approach towards the linear top-down design of MEMS resonators, based on their electrical specification, by the solution of the mechanical wave equation. In view of the central importance of thermal effects for the performance and stability of MEMS-based RF circuits, the temperature dependence was included in the model; the aim was to study the variations of the RF parameters of the resonators and to enable a temperature dependent MEMS oscillator simulation. The variations of the resonator parameters with respect to the ambient temperature were then verified by RF measurements in a vacuum chamber at temperatures between −35 ∘C and 85 ∘C. The systematic body of data revealed temperature coefficients of the resonant frequency between −26 ppm/K and −20 ppm/K, which are in good agreement with other data from the literature. Based on the MEMS resonator model derived, a MEMS oscillator was designed, simulated, and measured in a vacuum chamber yielding a measured temperature coefficient of the oscillation frequency of −26.3 ppm/K. The difference of the temperature coefficients of frequency of oscillator and resonator turned out to be mainly influenced by the limited Q-factor of the MEMS device. In both studies, the analytical model and the measurement showed very good agreement in terms of temperature dependence and the prediction of fabrication results of the resonators designed. This analytical modelling approach serves therefore as an important step towards the design and simulation of micro-electronics and micro-electromechanics in one uniform design process. Furthermore, temperature dependences of MEMS oscillators can now be studied by simulations instead of time-consuming and complex measurements.

Immunity to Temperature Fluctuations in Weakly Coupled MEMS Resonators

Characteristics of phase delay in capacitive pick-off circuits for MEMS resonators

A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

Temperature Compensation Method for MEMS Accelerometer Based on Resonant Frequency

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Temperature insensitive design of MEMS resonant accelerometer

Temperature-frequency Drift Suppression Via Electrostatic Stiffness Softening in MEMS Resonator with Weakened Duffing Nonlinearity

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

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Temperature Coefficient of Frequency Modeling for Cmos-Mems Bulk Mode Composite Resonators

Electrostatically-Driven Resonator on Soi with Improved Temperature Stability

A MEMS Resonant Accelerometer with High Performance of Temperature Based on Electrostatic Spring Softening and Continuous Ring-Down Technique

Self-Temperature-Compensated GaN MEMS Resonators Through Strain Engineering Up to 600 K

Near-ground state cooling in electromechanics using measurement-based feedback and Josephson parametric amplifier

Actuation Dependency of Frequency Tuning in MEMS Resonators

Significant tuning of internal mode coupling in doubly clamped MEMS beam resonators by thermal effect

Direct Measurement of A Spatially Varying Thermal Bath Using Brownian Motion

Multi-Physical Coupling Simulation of Thermal Effect on the Membrane Vibration Characteristics of Fabry-Perot Sensors

Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures

Motional sideband asymmetry of a solid-state mechanical resonator at room temperature

Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors