Abstract:Fabricating resonant cavities with conventional methods to improve the coupling efficiency of a detector in the terahertz (THz) region is difficult for the wavelength is too long. Here, we propose a solution by using the substrate cavity effect given that the substrate wavelength and thickness of the preparation device are in the same order. The planar dipole antenna-coupled Nb5N6 microbolometers with different substrate thicknesses were fabricated. The interference effect of the substrate cavity on the optical voltage response of the detector is analyzed experimentally and theoretically. The experimental results show that the optical response of the detector is determined by the length of the substrate cavity. Thus, the THz devices with different detection frequencies can be designed by changing the substrate cavity length. Furthermore, on the basis of this substrate cavity effect, an asymmetric coupled Fabry-Pérot (FP) cavity is constituted by simply placing a movable metallic planar mirror at the backside of the Si substrate. The incident THz radiation on the Nb5N6 microbolometer can be effectively manipulated by changing the substrate-mirror distance to modulate the phase relation between the reflect wave and the incident wave. The distinct radiation control can be observed, and the experiments can be well explained by numerically analyzing the responsivity dynamics that highlights the role of the FP cavity effect during radiation. All of the results discussed here can be extended to a broad range of frequency and other type of THz detectors.

A Tunable Optical Cavity for Enhancement of Nb5N6 Microbolometer THz Detector Absorption

Investigation of antenna-coupled Nb5N6 microbolometer THz detector with substrate resonant cavity

Fabry–Pérot Cavity-Coupled Microbolometer Terahertz Detector with a Continuously Tunable Air Spacer Gap

A Cavity-Coupled Microbolometer Terahertz Detector with a Metamaterial Reflector

Diffractive microlens integrated into Nb 5 N 6 microbolometers for THz detection

Characterizations of Diffractive Microlens in Nb5N6microbolometers Array for THz Detection

Tunable Narrowband Mid-Infrared Thermal Emitter with a Bilayer Cavity Enhanced Tamm Plasmon.

Nb5 N6 Microbolometer for THz Detection

Planar Double-Slot Antenna Integrated into a Nb5N6 Microbolometer THz Detector.

Antenna-coupled Uncooled Nb5N6microbolometers for Terahertz Imaging

A 0.6 THz quasi-optical detector based on a room microbolometer

Nb5N6 microbolometers integrated with diffractive lens for THz imaging

Tamm-cavity Terahertz Detector

Size Effect on the Performance of Nb5N6 Bolometer for THz Detection

The Design of Nb5N6 micro-bolometer for 0.3 THz Detector

Quasioptical Terahertz Detector Based on the Series Connection of Nb5n6 Microbolometers

Nb5n6 Microbolometer Array for A Compact Thz Imaging System

Wide-Range Bolometer with RF Readout TES

A Hybrid Antenna Coupled Nb&lt;sub&gt;5&lt;/sub&gt;N&lt;sub&gt;6&lt;/sub&gt; Microbolometer for Dual Polarization THz Detection

Nb5N6 bolometer operated at room temperature for detecting at 100 GHz

Influence of Substrate Thickness on the Responsivity of Antenna-Coupled Thz Microbolometers