Experimental and Numerical Study on Transverse Piezoelectricity of Xbiino3–(1 − X)pbtio3 Films by Multilayer Cantilevers

Ke-xue Sun,Shu-yi Zhang,Xiu-ji Shui,Kiyotaka Wasa
DOI: https://doi.org/10.7567/jjap.57.025801
IF: 1.5
2018-01-01
Japanese Journal of Applied Physics
Abstract:The effective transverse piezoelectric coefficient of the piezoelectric films xBiInO3–(1 − x)PbTiO3 () were studied experimentally and numerically by multilayer cantilevers. The xBiInO3–(1 − x)PbTiO3 thin films were deposited on (101)SrRuO3/(100)Pt/(100)MgO substrates and then covered with Pt electrode by RF-magnetron sputtering method. In experiments, the tip vibration amplitudes of the cantilevers for different x of the films were measured, in which the optimized compositions for maximizing the tip vibration can be found. Meanwhile, based on the bending model of multilayer piezoelectric cantilevers, the tip-deflection and transverse piezoelectricity of the cantilevers were simulated by COMSOL software. By comparing the experimental and numerical results, both are in agreement very well, and the mechanism of the optimized transverse piezoelectricity of the cantilevers was proposed finally.
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