Polystyrene Core–silica Shell Composite Particles: Effect of Mesoporous Shell Structures on Oxide CMP and Mechanical Stability

Yang Chen,Ailian Chen,Jiawei Qin
DOI: https://doi.org/10.1039/c6ra26437a
IF: 4.036
2017-01-01
RSC Advances
Abstract:Organic/inorganic composite particles with a core–shell structure exhibit potential applications in chemical mechanical polishing/planarization (CMP) for mechanically challenging materials (copper and low-k dielectrics etc.).
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