Abstract:This paper presents a resistor-based area-compact temperature sensor for on-chip thermal detection. It has three unique features: 1) the use of a differential low-pass RC filter (DLPF) for thermal sensing, which reduces the area; 2) successive approximation register (SAR)-quantization embedded in the DLPF, which reuses the DLPF capacitor for capacitive digital-to-analog conversion (CDAC), eliminates the CDAC references, and utilizes the full sensing range for quantization; and 3) a highly digital circuit architecture, which can be easily implemented using a standard digital design flow and migrated to different processes. The temperature sensor was fabricated in a 65-nm CMOS technology occupying 8400- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$ {\mu }\text{m}^{2}$ </tex-math></inline-formula> silicon area. It achieves 0.38 °C resolution at room temperature. After a two-point calibration, the sensor achieves a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$3\sigma $ </tex-math></inline-formula> inaccuracy of ±1.2 °C from −30 °C to 100°C. It consumes 35.3- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${\mu }\text{W}$ </tex-math></inline-formula> power from a 1.1-V supply. With a 2.5- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${\mu }\text{s}$ </tex-math></inline-formula> conversion time, the sensor achieves an 88 pJ/conversion energy efficiency, which yields a 12.7-pJ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\cdot \text{K}^{2}$ </tex-math></inline-formula> resolution figure-of-merit (FoM).

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