Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Sharp bend and large FSR ring resonator based on the free-form curves on a thin-film lithium niobate platform

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Ultra Sharp Curved Waveguide Design Based on Topology Optimization

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

A Rasorber-Like Waveguide Based on Thin Film

Compact Racetrack Resonator on LiNbO<sub>3</sub>

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Flexible structured high-frequency film bulk acoustic resonator for flexible wireless electronics

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Tunable large free spectral range microring resonators in lithium niobate on insulator

Arbitrary fabrication of complex lithium niobate three-dimensional microstructures for second harmonic generation enhancement

Twenty-nine million intrinsic Q-factor monolithic microresonators on thin-film lithium niobate

Polarization Coupling of $X$ -Cut Thin Film Lithium Niobate Based Waveguides

New silicon photonics integration platform enabled by novel micron-scale bends

Double-layer Thin-film LiNbO3 Longitudinally Excited Shear Wave Resonators with Ultra-large Electromechanical Coupling Coefficient and Spurious-Free Performance

LITHIUM NIOBATE THIN FILM BASED A1 MODE RESONATORS WITH FREQUENCY UP TO 16 GHZ AND ELECTROMECHANICAL COUPLING FACTOR NEAR 35%

Design and fabrication of a sub-3 dB grating coupler on an X-cut thin-film lithium niobate platform

Ultrathin 90-Degree Sharp Bends for Spoof Surface Plasmon Polaritons

Ultra-broadband and Low-Loss Edge Coupler for Highly Efficient Second Harmonic Generation in Thin-Film Lithium Niobate