Studies on the Nucleation of Mbe Grown Iii-Nitride Nanowires on Si

E. Yanxiong,Zhibiao Hao,Jiadong Yu,Chao Wu,Lai Wang,Bing Xiong,Jian Wang,Yanjun Han,Changzheng Sun,Yi Luo
DOI: https://doi.org/10.1088/1674-1056/26/1/016103
2017-01-01
Abstract:GaN and AlN nanowires (NWs) have attracted great interests for the fabrication of novel nano-sized devices. In this paper, the nucleation processes of GaN and AlN NWs grown on Si substrates by molecular beam epitaxy (MBE) are investigated. It is found that GaN NWs nucleated on in-situ formed Si3N4 fully release the stress upon the interface between GaN NW and amorphous Si3N4 layer, while AlN NWs nucleated by aluminization process gradually release the stress during growth. Depending on the strain status as well as the migration ability of III group adatoms, the different growth kinetics of GaN and AlN NWs result in different NW morphologies, i.e., GaN NWs with uniform radii and AlN NWs with tapered bases.
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