Structure With Thin Siox/Sinx Bilayer And Al Electrodes For High-Frequency, Large-Coupling, And Low-Cost Surface Acoustic Wave Devices
Junyao Shen,Sulei Fu,Rongxuan Su,Huiping Xu,Weibiao Wang,Zengtian Lu,Qiong Feng,Fei Zeng,Cheng Song,Feng Pan
DOI: https://doi.org/10.1016/j.ultras.2021.106460
IF: 4.2
2021-01-01
Ultrasonics
Abstract:With the development of fifth-generation wireless systems, the Internet of Things, and health services, surface acoustic wave (SAW)-based filters and sensors have attracted considerable interest. This study presents a new structure for high-frequency, large-coupling, and low-cost SAW devices that helps implement high-frequency and wideband filters and enhances the sensitivity of sensors. The structure is based on 15 degrees Y-X LiNbO3, thin SiOx/SiNx bilayer overlay, and Al electrodes. Furthermore, a low-cost fabrication process for SAW devices based on this structure was designed. Simulation and experimental results show that the bilayer substantially weakens the leaky nature of shear-horizontal-type SAWs with a phase velocity higher than that of a slow-shear bulk wave in LiNbO3. Thus, the limitation related to the velocity of 4029 m/s was overcome, and the phase velocity reached approximately 4500 m/s, which means an increase of 50% compared with that of conventional Cu/15 degrees Y-X LiNbO3 devices. Consequently, the frequency dramatically increases, and the quality of the SAW response is ensured. Simultaneously, a large electromechanical coupling factor close to 20% can be achieved, which is still suitable for wideband filters and sensors with high energy transduction coefficients. This new structure is expected to become a major candidate for SAW devices in the future.