Stiffness Characteristics of Two Types of Micro-Motion Flexure Linear Guides

CAO Jiayong,ZHU Yu,DUAN Guanghong,YIN Wensheng

DOI: https://doi.org/10.3321/j.issn:1000-0054.2006.05.009

2006-01-01

Abstract:The ratio of the y-direction stiffness to the x-direction stiffness was used to evaluate the guide performance of a micro-motion flexure guide.Castigliano's second theorem was used to derive a series of analytical equations for computing the static stiffnesses for different directions of two types of micro-motion flexure guides.A case study demonstrates that the micro-motion flexure guide with folded chains has better guide performance.The methods and conclusions can be used to provide some references for micro-motion flexure guide selection and design.