Dynamic Scaling Behavior of 6061 Aluminum Alloy Surface Implanted by Nitrogen Ion Using Plasma-Based Ion Implantation Technology

WL Li,Y Sun,F Zheng,WD Fei
DOI: https://doi.org/10.3321/j.issn:0412-1961.2002.07.015
IF: 1.797
2002-01-01
ACTA METALLURGICA SINICA
Abstract:The roughness and dynamic scaling behavior of the 6061 Al alloy surface implanted by nitrogen ion using plasma based ion implantation technology were studied by means of atomic force microscope and grazing incidence X-ray scattering. The results indicate that the roughness of the surface decreases with increasing of the implantation time at the implantation initial stage, when the implantation time is longer the roughness of the surface increases with increasing of the implantation time. Under far from equilibrium conditions, the formation mechanism of ion implantation layer can be studied in terms of the fractal theory. The surface exhibits a fractal characteristic after a longer time of implantation. By using the values of static scaling exponent, growth exponent and dynamic scaling exponent, the dynamic scaling behavior is also discussed.
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