Simple New Method for the Design of Two-Dimensional Zero-Reference Marks

ZHOU Cheng-gang,YE Xi-biao,ZHANG Yang,HUANG Wen-hao
DOI: https://doi.org/10.3969/j.issn.1003-501x.2007.06.026
2007-01-01
Abstract:It is very important to provide a zero reference signal for absolute coordinate in the fields of microelectronic fabrication and nano technology. The zero-reference signals which indicate the origin of a two-dimensional coordinate are obtained from the autocorrelation of two identical two-dimensional zero-reference gratings. The design of codes which generate optimum signals is rather complex, especially for larges codes of two-dimensional marks. In this paper, we present a simple method for the design of two-dimensional zero-reference codes. Combining with a global method, one-dimensional zero-reference codes was designed by means of a DIRECT algorithm, and then the optimum codes are extended to two-dimensional keeping the same sensitively. This method is demonstrated to be effective for solving this problem, and the laborious calculations are greatly reduced.
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