A Novel Three-Dimensional Zero-Reference System

ZHOU Cheng-gang,YE Xi-biao,ZHANG Yang,HUANG Wen-hao
DOI: https://doi.org/10.3969/j.issn.0253-2778.2007.07.013
2007-01-01
Journal of University of Science and Technology of China
Abstract:A novel three-dimensional zero-reference system was proposed.Two groups of specially coded planar zero-reference gratings were overlapped by beam splitter and imaging optics in two perpendicular planes.The zero reference signals of each plane were obtained from the same pair of gratings.The zeros of the two planes' common axis were overlapped by carefully adjusting of the position of the gratings,thus obtaining a perfect threedimensional absolute coordinate with overlapped zero reference in XYZ-direction.This novel three-dimensional zero-reference system can overcome the limit of former zero-reference gratings which can only determine one or two dimensional zero position.Experimental results prove that a measuring accuracy of nanometer degree can be achieved with this simple system.
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