Approaches Enhancing the Process Accuracy of Fluid Jet Polishing for Making Ultra-Precision Optical Components

Zongfu Guo,Tan Jin,Guizhi Xie,Ange Lu,Meina Qu
DOI: https://doi.org/10.1016/j.precisioneng.2018.08.021
IF: 3.315
2018-01-01
Precision Engineering
Abstract:Recent research has shown that the computer-controlled fluid jet polishing (FJP) process can generate nanometer-level form accuracy on free surface optical components. The key issues affecting the machining accuracy of the FJP process, including the deviation of the removal function, dynamic response of the moving tables and the change of material removal rates at a small-scale dwell time, have been investigated. Approaches using signal filtering and alignment methods to reduce the measurement errors of the removal functions in FJP are presented. An enhancing algorithm is proposed to improve the rotational symmetry of the removal function, with correction factors being included in the quality assessment to adjust the change in the quality of the removal function with different dwell times. The dynamic responses and moving accuracy of the worktable were measured, and their effects on the FJP polishing process were analyzed. Fluid jet polishing experiments using small-scale dwell time (less than 5 s) under intermittent motion and continuous motion modes were also performed. The experimental results show that the fluctuation of enhanced removal functions is less than that of the original functions. The residual information on the surface, related to the path distance, is barely noticeable when the distance is less than 0.4 mm, when a nozzle with a diameter of 1 mm diameter is used. The material removal experiments with small-scale dwell times indicate that the removal rate is stable when the worktable is in continuous motion.
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