Abstract:An optimal design of semiconductor device and its process uniformity are critical factors affecting desired figure-of-merits as well as reducing fabrication cost of fixing possible malfunctioning in semiconductor manufacturing. Two main tasks in optimal device design for semiconductor manufacturing, i.e., parameter optimization and modeling, have been typically used either to characterize the devices by understanding how each parameter affects the device performances or to calibrate the parameters for SPICE circuit simulation. However, there still remains limitations in describing the relationship between all manufacturing parameters and figure-of-merits using several simple equations human experts can utilize. Even with the best model currently available, the optimal design of semiconductor device heavily relies on experiences of human experts and deals with time-consuming ad-hoc trials and non-holistic approaches. In this paper, we propose a new approach for data-based accurate electrical modeling of transistor, which is the most fundamental unit device of semiconductor, and fast optimization of its manufacturing parameters. Instead of the previous analytic approaches, finding finite equations derived from semiconductor physics, we utilize machine learning technique and neural networks to find appropriate modeling functions from data pairs of parameters and figure-of-merits. And for given desired figure-of-merits, we find optimal manufacturing parameters in holistic manner by using the learned functions of neural networks and fast gradient-based optimization method. Experimental results show that our neural-network-based-model directly estimate figure-of-merits with competitive accuracy and that our holistic optimization technique accurately and rapidly adapts the manufacturing parameters to meet desired figure-of-merits.

Multivariate Rational Regression and Its Application in Semiconductor Device Modeling

Application of Gaussian Processes with Variable Shrinkage Method and Just-in-time Modeling in the Semiconductor Industry

Just-In-Time Modeling with Variable Shrinkage Based on Gaussian Processes for Semiconductor Manufacturing

A Physics-Informed Neural Networks Algorithm for Simulating Semiconductor Devices

Multiphysics Simulation of Multifilamentary Conduction Resistive Random Access Memory

Quantitative fitting of nonlinear current-voltage curves and parameter retrieval of semiconducting nanowire, nanotube and nanoribbon devices.

DNFIT Based Curve Fitting and Prediction in Semiconductor Modeling and Simulation.

Neural Approach for Modeling and Optimizing Si-MOSFET Manufacturing

Statistically Modeling I–V Characteristics of CNT-FET with LASSO

Knowledge-based neural network SPICE modeling for MOSFETs and its application on 2D material field-effect transistors

The Device Compact Model Based on Multi-gradient Neural Network and Its Application on MoS2 Field Effect Transistors

An Support Vector Regression Based Nonlinear Modeling Method For Sic Mesfet

Modeling of SiC MESFETs by Using Support Vector Machine Regression

A Unified Electrothermal Behavior Modeling Method for Both SiC MOSFET and GaN HEMT

Low-cost High-Accuracy Variation Characterization for Nanoscale IC Technologies Via Novel Learning-Based Techniques.

Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting

Improving Semiconductor Device Modeling for Electronic Design Automation by Machine Learning Techniques

An efficient model algorithm for two-dimensional field-effect transistors

Approaches and Options for Modeling Sub-0.1 /spl Mu/m CMOS Devices

Multi-scale Quantum Point Contact Model for Filamentary Conduction in Resistive Random Access Memories Devices

Machine Learning-Based Figure of Merit Model of SIPOS Modulated Drift Region for U-MOSFET