Abstract:A grating coupled terahertz (THz) surface plasmon polariton (SPP) resonant biochemical sensing structure is designed and simulated, which is formed by etching submillimeter gratings on the surface of indium antimonide (InSb) substrate. The simulation results based on the phase matching equation show that when the TM polarized THz parallel beam is illuminated into the grating interval at a 30 ° incidence angle, the ± 1 order THz diffraction beam of the grating can excite low-frequency SPP and high-frequency SPP with opposite propagation directions, respectively. Due to the ease of using commercial THz time-domain spectroscopy (TDS) devices for accurate measurement of low-frequency SPP, this paper systematically simulates and analyzes the dependence of the resonance and sensing characteristics of low-frequency SPP on grating structural parameters. The simulation results indicate that InSb grating bare sensing chip cannot provide a detectable response to the tyrosine monolayer adsorption layer. The reason for this is that the penetration depth of the low-frequency SPP evanescent field is much greater than the thickness of the tyrosine adsorption layer, resulting in insufficient interaction between the two. In order to detect biomolecules, this article simulated and analyzed the sensitization method of InSb grating covered with porous film. Porous films have a molecular enrichment effect, which can extend the interaction between THz surface waves and biological targets from a single molecule scale to the entire film thickness, thereby improving the biological detection sensitivity of the sensor. The simulation results show that, taking tyrosine as an example, when the InSb grating surface is covered with a porous polymethyl methacrylate (PMMA) film with a thickness of 120 μm and a porosity of 0.4, its adsorption sensitivity is 0.39 THz/unit volume fraction.

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