Abstract:This paper reports on a fiber-optic directional microphone with a bionic MEMS diaphragm for low-frequency sound source localization. The diaphragm consists of two 3 mm $times3$ mm wings connected by a 1 mm $times1$ mm bridge, and two 0.2 mm $times0.1$ mm torsion beams anchor the diaphragm to the Silicon-On-Insulator (SOI) frame along the bridge's central axis. The bridge causes the mechanical coupling between the two wings, resulting in rocking and bending vibration modes of the diaphragm. The designed microphone contains a closed back cavity and works by measuring vibration at one of the diaphragm's distal edges by a fiber-optic Fabry-Perrot interferometer (FPI). Simulation and experimental results demonstrated that the microphone can make a significant directional response in a wide low-frequency band centered on the rocking-mode eigenfrequency, giving a typical bi-directional polar pattern, but its directionality disappears at the bending-mode eigenfrequency. The directional sensitivity of the microphone was determined to be 1.86 mV/° at 300 Hz based on the measured linear response to the incident angle in an angular range from $theta =0$ to 60°. The minimum detectable pressure (MDP) of the microphone relies on both the incident angle and sound frequency, and MDP was measured to be $12.68mu $ Pa/ $surd $ Hz at 300 Hz and $theta = 100^{circ }$ . The fiber-optic FPI serving as the a-ousto-optic transducer offers the directional microphone high sensitivity and strong immunity to electromagnetic interference, rendering it suitable for low-frequency sound source localization in harsh environments, especially for tracing the environmental noise sources.

A Miniature Fiber-Optic Microphone Based on an Annular Corrugated MEMS Diaphragm

A highly sensitive fiber-optic microphone based on corrugated MEMS diaphragm with sub-µm thickness

Coherent OTDR Based Ultra-High Sensitive Acoustic Sensor Assisted with Distributed Microstructured Optical Fiber(DMOF) and Hollow Cylinder Transducer

Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection

Dual Enhanced Fiber-Optic Microphone Using Sensitive Diaphragm-Free Transducer and Ultrahigh-Resolution Spectral Demodulation

A miniature fiber-optic microphone based on plano-concave micro-interferometer

A Miniature Fiber-Optic Fabry-Perot Accelerometer Fabricated by Laser Micro-Machining

Small In-Fiber Fabry-Perot Low-Frequency Acoustic Pressure Sensor with PDMS Diaphragm Embedded in Hollow-Core Fiber

Low-Frequency Bi-Directional Microphone Based on a Combination of Bionic MEMS Diaphragm and Fiber Acousto-Optic Transducer

Sensitivity-enhanced Fabry-Perot Interferometric Fiber-Optic Microphone Using Hollow Cantilever.

A fiber-optic Fabry-Perot acoustic sensor based on PDMS diaphragm

Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds

Highly sensitive ZnO-doped PET diaphragm-based fiber optic microphone

Ultracompact optical fiber acoustic sensors based on a fiber-top spirally-suspended optomechanical microresonator.

MEMS-Based High-Sensitivity Fabry–Perot Acoustic Sensor with a 45° Angled Fiber

Single-chip Condenser Miniature Microphone with a High Sensitive Circular Corrugated Diaphragm

A mach-zehnder photonic mems microphone with high sensitivity, 1/f noise suppression, and broadband response

Miniature Fiber Pressure Sensor Based on an In-Fiber Confocal Cavity

An Acoustic Sensor Based on Active Fiber Fabry-Pérot Microcavities

Diaphragm Based Long Cavity Fabry–Perot Fiber Acoustic Sensor Using Phase Generated Carrier

Diaphragm-type Fiber-Optic Interferometric Acoustic Sensor