Abstract:In order to in-depth study the surface morphology formation mechanism and surface quality control methods of fused silica repaired sites, numerical simulation and experimental method were firstly used to analyze the process of CO2 laser rapid ablation mitigation, as well as the relationships between processing parameters, repaired angle and surface quality. Then the physical problems of the heat-affected zone, fictive temperature and structure relaxation under the irradiation of pulsed laser were studied through the mathematical model and Raman spectroscopy system. The studies found that the fixed depth morphology was formed starting from the third track’s laser scanning during the processing of fused silica by the pulsed laser that moved according to the arc trajectory. The bottom of the processed morphology presented uneven concave-convex features, which was different from the uniform topography formed by the laser linear scanning processing. The processing angle decreased as the trajectory indentation increased, while there was no clear variation law between the processed surface quality and the indentation. The thickness of the heat-affected zone characterized by the fictive temperature was consistent with the experiment, and it was proportional to the laser pulse width. The negative factors caused by the thermal effect in the laser repair process could be suppressed by reducing the laser pulse width. These studies can provide guidance for the optimization of the CO2 laser repair process and the improvement of the repaired surface quality.

Experimental Investigation of Subsurface Damage Depth of Lapped Optics by Fluorescent Method

Distortion Correction in Surface Defects Evaluating System of Large Fine Optics

Non-destructive evaluation of UV pulse laser-induced damage performance of fused silica optics

Detection of surface defects and subsurface defects of polished optics with multisensor image fusion

Analysis and Experimental Investigation of Laser Induced Damage of Optics

Quantitative Evaluation of Subsurface Damage by Improved Total Internal Reflection Microscopy

Assessment of sub-micron subsurface damage in glass

Non-destructive testing of subsurface damage for early indication of laser-induced damage threshold in fused silica

Experimental investigation and numerical simulation of defect elimination by CO2 laser raster scanning on fused silica

Incident Laser Modulation of a Repaired Damage Site with a Rim in Fused Silica Rear Subsurface

Investigation of Subsurface Damage Density and Morphology Impact on the Laser-Induced Damage Threshold of Fused Silica

Confocal laser scanning and 3D reconstruction methods for the subsurface damage of polished optics

Theoretical and experimental investigation on surface generation and subsurface damage in fixed abrasive lapping of optical glass

Combined Modulation to Incident Laser by Subsurface Crack and Contaminant on Fused Silica

Correlation Between Photoluminescence Properties of Surface Defects and Laser-Induced Damage Threshold of Fused Silica

Characterization of artificial indentation defects in fused silica surface and its damage performance under 355 nm nanosecond laser

Numerical simulation of the modulation to incident laser by the repaired damage site in a fused silica subsurface

Influence of bulk defects on bulk damage performance of fused silica optics at 355 nm nanosecond pulse laser

Investigation on Hybrid Laser Ablation and Its Application in Fused Silica Damage Mitigation.

A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes

Morphology evolution mechanisms and localized structural modification of repaired sites on fused silica optics processed by CO2 laser rapid ablation mitigation