Abstract:The piezoelectric sensor-actuator plays an important role in micro high-precision dynamic systems such as medical robots and micro grippers. These mechanisms need high-precision position control, while the size of the sensor and actuator should be as small as possible. For this paper, we designed and manufactured a structure-integrated piezoelectric sensor-actuator and proposed its PID (Proportion Integral Differential) control system based on the dynamic hysteresis nonlinear model and the inverse model. Through simplifying the structure of the piezoelectric sensor-actuator by the centralized parameter method, this paper establishes its dynamic model and explores the input–output transfer function by taking the relationship between the output force and displacement as the medium. The experiment shows the maximum distance of the hysteresis curve is 0.26 μm. By parsing the hysteresis curve, this paper presents a dynamic hysteresis nonlinear model and its inverse model based on a 0.5 Hz quasi-static model and linear transfer function. Simulation results show that the accuracy of the static model is higher than that of the dynamic model when the frequency is 0.5 Hz, but the compensation accuracy of the dynamic model is obviously better than that of the static model with the increase of the frequency. This paper also proposes a control system for the sensor-actuator by means of the inverse model. The simulation results indicate that the output root mean square error was reduced to one-quarter of the original, which proves that the structure-integrated piezoelectric sensor-actuator and its control system have a great significance for signal sensing and output control of micro high-precision dynamic systems.

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