Abstract:Low-noise lasers are of central importance in a wide variety of applications, including high spectral-efficiency coherent communication protocols, distributed fibre sensing, and long distance coherent LiDAR. In addition to low phase noise, frequency agility, that is, the ability to achieve high-bandwidth actuation of the laser frequency, is imperative for triangular chirping in frequency-modulated continuous-wave (FMCW) based ranging or any optical phase locking as routinely used in metrology. While integrated silicon-based lasers have experienced major advances and are now employed on a commercial scale in data centers, integrated lasers with sub-100 Hz-level intrinsic linewidth are based on optical feedback from photonic circuits that lack frequency agility. Here, we demonstrate a wafer-scale-manufacturing-compatible hybrid photonic integrated laser that exhibits ultralow intrinsic linewidth of 25 Hz while offering unsurpassed megahertz actuation bandwidth, with a tuning range larger than 1 GHz. Our approach uses ultralow-loss (1 dB/m) Si$_3$N$_4$ photonic microresonators, combined with aluminium nitride (AlN) or lead zirconium titanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation. Electrically driven low-phase noise lasing is attained by self-injection locking of an Indium Phosphide (InP) laser chip and only limited by fundamental thermo-refractive noise. By utilizing difference drive and apodization of the photonic chip, a flat actuation response up to 10 MHz is achieved. We leverage this capability to demonstrate a compact coherent LiDAR engine that can generate up to 800 kHz FMCW triangular optical chirp signals, requiring neither any active linearization nor predistortion compensation, and perform a 10 m optical ranging experiment, with a resolution of 12.5 cm.

Tunable Self-Injected Fabry-Perot Laser Diode Coupled to an External High-Q Si3N4/SiO2 Micro-Ring Resonator

Hybrid Integrated Narrow-Linewidth Semiconductor Lasers

Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

Coherent mode-combined ultra-narrow-linewidth single-mode micro-disk laser

Narrow Linewidth Tunable V-cavity Laser Using Self-Injection Method

Narrow-linewidth Self-Injection Locked Diode Laser with a High-Q Fiber Fabry-Perot Resonator

Laser diode self-injection locking to an integrated high-Q Fabry-Pérot microresonator

Frequency Modulated Continuous Wave Narrow Linewidth Laser Diode Based on Self-injection locking with External Micro-ring Resonator

Hybrid integrated self-injection locked narrow linewidth laser based on feedback tunable silicon nitride micro-ring resonator

The Wavelength Tuning Performance of Narrow Linewidth Laser-Diode Coupled to an External High-Q Si3N4 Micro-Ring Resonator

Wavelength-Tunable Narrow-Linewidth Laser Diode Based on Self-Injection Locking with a High-Q Lithium Niobate Microring Resonator

A Compact Self-Injection-Locked Narrow-Linewidth Diode Laser with Narrowband Dielectric Filter

Narrow linewidth semiconductor lasers based on nonlinear self-injection locking

Widely tunable and narrow-linewidth chip-scale lasers from near-ultraviolet to near-infrared wavelengths

Narrow-linewidth 852-nm DBR-LD with self-injection lock based on high-fineness optical cavity filtering

Narrow Linewidth Single-Mode Slotted Fabry–Pérot Laser Using Deep Etched Trenches

Ultra-Narrow Linewidth Chip-Scale Heterogeneously Integrated Silicon/III-V Tunable Laser Pumped Si/Si3N4 SBS Laser

Narrow Linewidth Single Frequency Fiber Laser Based on High-Q Silicon Nitride Microring Reflector

Hertz-linewidth and frequency-agile photonic integrated extended-DBR lasers

Ultralow-noise frequency-agile photonic integrated lasers

Self‐Injection Locked Frequency Conversion Laser